固-液摩擦纳米发电机

doi:10.3901/JME.2021.21.160

摘要/Abstract

摘要： 摩擦纳米发电机的发明为人们在能量收集领域开辟了新道路。固-液摩擦纳米发电机是基于固-液界面摩擦起电与静电感应效应耦合的发电装置，因其制造简单、成本低、能有效地收集多种形式的低频率水能，使其在摩擦纳米发电机中占有重要的地位。详述了固-液界面的起电机理，概括了固-液摩擦纳米发电机的典型结构和工作模式。分析了液体、固体摩擦材料的特性对摩擦纳米发电机输出性能的影响，介绍了常用的提高摩擦发电性能的微纳制造方法。综述了一系列固-液摩擦纳米发电机在自驱动型传感器和微机械自供电系统中的应用。总结了固-液摩擦纳米发电机目前存在的挑战，展望了其未来发展的趋势。

关键词: 摩擦纳米发电机, 固-液界面, 水能, 摩擦起电, 静电感应

Abstract: A new field of collecting energy is opened up because of the invention of triboelectric nanogenerators (TENG). With simple structure, low cost and great efficiency of collecting various forms of low-frequency water energy, solid-liquid triboelectric nanogenerator (SL-TENG) is based on the coupling of contact electrification on the solid-liquid interface and the electrostatic induction. It is occupied an important position in the field of TENG. The mechanism of liquid-solid contact electrification, typical structure and working mode are elaborated. The influence of the properties of liquid friction materials and solid friction materials on the output performance of TENG are analyzed. Several common micro/nano-structure fabrication methods are reviewed for enhancing the performances of TENG. A series of application researches in triboelectric self-powered sensors and self-powered microsystems are summarized. The remaining challenges and potential opportunities for the future development of SL-TENG are discussed.

Key words: triboelectric nanogenerators, solid-liquid interface, water energy, contact electrification, electrostatic induction

中图分类号:

TH39
TH117

禹健, 郭艳婕, 杨雷. 固-液摩擦纳米发电机[J]. 机械工程学报, 2021, 57(21): 160-181.

YU Jian, GUO Yanjie, YANG Lei. Solid-Liquid Triboelectric Nanogenerator[J]. Journal of Mechanical Engineering, 2021, 57(21): 160-181.

参考文献

[1] 杨仙, 闵伶俐, 朱颖琳, 等. 纳米孔道动电效应能量转换系统的前沿研究进展[J]. 应用化学, 2018, 35(6):613-624. YANG Xian, MIN Lingli, ZHU Yinglin, et al. Recent research progress on nanopores and nanochannels based electrokinetical energy conversion systems[J]. Chinese Journal of Applied Chemistry, 2018, 35(6):613-624.
[2] SCRUGGS J, JACOB P. Harvesting ocean wave energy[J]. Science, 2009, 323(5918):1176-1178.
[3] KORNBLUH R D, PELRINE R, PRAHLAD H, et al. From boots to buoys:Promises and challenges of dielectric elastomer energy harvesting[J]. Proceedings of SPIE, 2011, 7976:797605.
[4] HAN Qinkai, DING Zhuang, SUN Wenpeng, et al. Hybrid triboelectric-electromagnetic generator for self-powered wind speed and direction detection[J]. Sustainable Energy Technologies and Assessments, 2020, 39:100717.
[5] WANG Yang, GAO Shouwei, XU Wanghuai, et al. Nanogenerators with superwetting surfaces for harvesting water/liquid energy[J]. Advanced Functional Materials, 2020, 30(26):1908252.
[6] FAN Fengru, TIAN Zhongqun, WANG Zhonglin. Flexible triboelectric generator[J]. Nano Energy, 2012, 1(2):328-334.
[7] WANG Zhonglin, SONG Jinhui. Piezoelectric nanogenerators based on zinc oxide nanowire arrays[J]. Science, 2006, 312(5771):242-246.
[8] KIM T, CHUNG J, KIM D Y, et al. Design and optimization of rotating triboelectric nanogenerator by water electrification and inertia[J]. Nano Energy, 2016, 27:340-351.
[9] YAO Guang, KANG Lei, LI Jun, et al. Effective weight control via an implanted self-powered vagus nerve stimulation device[J]. Nature Communications, 2018, 9(1):5349.
[10] LI Anyin, ZI Yunlong, GUO Hengyu, et al. Triboelectric nanogenerators for sensitive nano-coulomb molecular mass spectrometry[J]. Nature Nanotechnology, 2017, 12(5):481-487.
[11] YANG Shanshan, SU Yudan, XU Ying, et al. Mechanism of electric power generation from ionic droplet motion on polymer supported graphene[J]. Journal of the American Chemical Society, 2018, 140(42):13746-13752.
[12] NIE Jinhui, WANG Ziming, REN Zewei, et al. Power generation from the interaction of a liquid droplet and a liquid membrane[J]. Nature Communications, 2019, 10(1):2264.
[13] XUE Guobin, XU Ying, DING Tianpeng, et al. Water-evaporation-induced electricity with nanostructured carbon materials[J]. Nature Nanotechnology, 2017, 12(4):317-321.
[14] TANG Wei, CHEN Baodong, WANG Zhonglin. Recent progress in power generation from water/liquid droplet interaction with solid surfaces[J]. Advanced Functional Materials, 2019, 29(41):1901069.
[15] JIANG Dongyue, XU Minyi, DONG Ming, et al. Water-solid triboelectric nanogenerators:An alternative means for harvesting hydropower[J]. Renewable & Sustainable Energy Reviews, 2019, 115:109366.
[16] XU Wanghuai, ZHENG Huanxi, LIU Yuan, et al. A droplet-based electricity generator with high instantaneous power density[J]. Nature, 2020, 578(7795):392-396.
[17] NIE Jinhui, JIANG Tao, SHAO Jiajia, et al. Motion behavior of water droplets driven by triboelectric nanogenerator[J]. Applied Physics Letters, 2018, 112(18):183701.
[18] PARK H Y, KIM H K, HWANG Y H, et al. Water-through triboelectric nanogenerator based on Ti-mesh for harvesting liquid flow[J]. Journal of the Korean Physical Society, 2018, 72(4):499-503.
[19] AHN J H, HWANG J Y, KIM C G, et al. Unsteady streaming flow based TENG using hydrophobic film tube with different charge affinity[J]. Nano Energy, 2020, 67:104269.
[20] ZHAO Xuejiao, KUANG Shuangyang, WANG Zhonglin, et al. Highly adaptive solid-liquid interfacing triboelectric nanogenerator for harvesting diverse water wave energy[J]. ACS Nano, 2018, 12(5):4280-4285.
[21] ZHU Guang, SU Yuanjie, BAI Peng, et al. Harvesting water wave energy by asymmetric screening of electrostatic charges on a nanostructured hydrophobic thin-film surface[J]. ACS Nano, 2014, 8(6):6031-6037.
[22] ZHANG Xiangqian, YU Min, MA Ziran, et al. Self-powered distributed water level sensors based on liquid-solid triboelectric nanogenerators for ship draft detecting[J]. Advanced Functional Materials, 2019, 29(41):1900327.
[23] ZHANG Weiqiang, WANG Pengfei, SUN Kun, et al. Intelligently detecting and identifying liquids leakage combining triboelectric nanogenerator based self-powered sensor with machine learning[J]. Nano Energy, 2019, 56, 277-285.
[24] SHI Qiongfeng, WANG Hao, LEE C K. Using water as A self-generated triboelectric sensor for pressure and flow rate measurement[C]//2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems(NEMS), April 9-12, 2017, University of California, Los Angeles. California:IEEE-NEMS, 2017:635-638.
[25] NIE Jinhui, REN Zewei, SHAO Jiajia, et al. Self-powered microfluidic transport system based on triboelectric nanogenerator and electrowetting technique[J]. ACS Nano, 2018, 12(2):1491-1499.
[26] KUSHWAHA H S, KUMAR A, KUMAR R, et al. A water-driven triboelectric generator for electrocatalytic wastewater treatment[J]. Energy Technology, 2018, 6(4):670-676.
[27] ZHAO Xuejiao, ZHU Guang, FAN Youjun, et al. Triboelectric charging at the nanostructured solid/liquid interface for area-scalable wave energy conversion and its use in corrosion protection[J]. ACS Nano, 2015, 9(7):7671-7677.
[28] HELSETH L E. Interdigitated electrodes based on liquid metal encapsulated in elastomer as capacitive sensors and triboelectric nanogenerators[J]. Nano Energy, 2018, 50:266-272.
[29] LIANG Fei, ZHAO Xuejiao, LI Huayang, et al. Stretchable shape-adaptive liquid-solid interface nanogenerator enabled by in-situ charged nanocomposite membrane[J]. Nano Energy, 2020, 69:104414.
[30] WU Yinghong, LUO Yang, QU Jingkui, et al. Liquid single-electrode triboelectric nanogenerator based on graphene oxide dispersion for wearable electronics[J]. Nano Energy, 2019, 64:103948.
[31] ZHENG Li, LIN Zonghong, CHENG Gang, et al. Silicon-based hybrid cell for harvesting solar energy and raindrop electrostatic energy[J]. Nano Energy, 2014, 9:291-300.
[32] SU Yuanjie, WEN Xiaonan, ZHU Guang, et al. Hybrid triboelectric nanogenerator for harvesting water wave energy and as a self-powered distress signal emitter[J]. Nano Energy, 2014, 9:186-195.
[33] WIJEWARDHANA K R, SHEN T Z, JAYAWEERA E N, et al. Hybrid nanogenerator and enhancement of water-solid contact electrification using triboelectric charge supplier[J]. Nano Energy, 2018, 52:402-407.
[34] XIE Yannan, WANG Sihong, NIU Simiao, et al. Grating-structured freestanding triboelectric-layer nanogenerator for harvesting mechanical energy at 85% total conversion efficiency[J]. Advanced Materials, 2014, 26(38):6599-6607.
[35] XU Wanghuai, ZHOU Xiaofeng, HAO Chonglei, et al. SLIPS-TENG:Robust triboelectric nanogenerator with optical and charge transparency using a slippery interface[J]. National Science Review, 2019, 6(3):540-550.
[36] LIU Xianming, HUANG Zhendong, OH S W, et al. Carbon nanotube (CNT)-based composites as electrode material for rechargeable Li-ion batteries:a review[J]. Composites Science and Technology, 2012, 72(2):121-144.
[37] WANG Xuan, ZHI Linjie, MÜLLEN K. Transparent, conductive graphene electrodes for dye-sensitized solar cells[J]. Nano Letters, 2008, 8(1):323-327.
[38] YI Fang, WANG Xiaofeng, NIU Simiao, et al. A highly shape-adaptive, stretchable design based on conductive liquid for energy harvesting and self-powered biomechanical monitoring[J]. Science Advances, 2016, 2(6):1501624.
[39] WANG Xiaofeng, YIN Yajiang, YI Fang, et al. Bioinspired stretchable triboelectric nanogenerator as energy-harvesting skin for self-powered electronics[J]. Nano Energy, 2017, 39:429-436.
[40] YANG Yanqin, SUN Na, WEN Zhen, et al. Liquid-metal-based super-stretchable and structure-designable triboelectric nanogenerator for wearable electronics[J]. ACS Nano, 2018, 12(2):2027-2034.
[41] ZHANG Binbin, ZHANG Lei, DENG Weili, et al. Self-powered acceleration sensor based on liquid metal triboelectric nanogenerator for vibration monitoring[J]. ACS Nano, 2017, 11(7):7440-7446.
[42] NIE Jinhui, REN Zewei, XU Liang, et al. Probing contact-electrification-induced electron and ion transfers at a liquid-solid interface[J]. Advanced Materials, 2020, 32(2):1905696.
[43] ZOU Haiyang, ZHANG Ying, GUO Litong, et al. Quantifying the triboelectric series[J]. Nature Communications, 2019, 10(1):1427.
[44] WANG Zhonglin. Triboelectric nanogenerators as new energy technology for self-powered systems and as active mechanical and chemical sensors[J]. ACS Nano, 2013, 7(11):9533-9557.
[45] ZHU Guang, LIN Zonghong, JING Qingshen, et al. Toward large-scale energy harvesting by a nanoparticle-enhanced triboelectric nanogenerator[J]. Nano Letters, 2013, 13(2):847-853.
[46] CHEN Jie, GUO Hengyu, HE Xianming, et al. Enhancing performance of triboelectric nanogenerator by filling high dielectric nanoparticles into sponge PDMS film[J]. ACS Applied Materials & Interfaces, 2016, 8(1):736-744.
[47] CHENG Gang, LIN Zonghong, DU Zuliang, et al. Simultaneously harvesting electrostatic and mechanical energies from flowing water by a hybridized triboelectric nanogenerator[J]. ACS Nano, 2014, 8(2):1932-1939.
[48] 赖美慧. 基于PDMS复合摩擦层的微纳调控及其提高摩擦纳米发电机输出性能的研究[D]. 重庆:重庆大学, 2018. LAI Meihui. Study on micro-nano regulation based on PDMS composite friction layer and its improvement of output performance of triboelectric nanogenerator[D]. Chongqing:Chongqing University, 2018.
[49] SINGH M, SHEETAL A, SINGH H, et al. Animal hair-based triboelectric nanogenerator (TENG):A substitute for the positive polymer layer in TENG[J]. Journal of Electronic Materials, 2020, 49(5):3409-3416.
[50] MARIELLO M, SCARPA E, ALGIERI L, et al. Novel flexible triboelectric nanogenerator based on metallized porous PDMS and Parylene C[J]. Energies, 2020, 13(7):1625.
[51] CHEN Huamin, XU Yun, BAI Lin, et al. Optimization of contact-mode triboelectric nanogeneration for high energy conversion efficiency[J]. Science China Information Sciences, 2018, 61(6):060416.
[52] ZHANG S L, XU Minyi, ZHANG Chunli, et al. Rationally designed sea snake structure based triboelectric nanogenerators for effectively and efficiently harvesting ocean wave energy with minimized water screening effect[J]. Nano Energy, 2018, 48:421-429.
[53] CHOI D, KIM D W, YOO D, et al. Spontaneous occurrence of liquid-solid contact electrification in nature:toward a robust triboelectric nanogenerator inspired by the natural lotus leaf[J]. Nano Energy, 2017, 36:250-259.
[54] WANG Zhonglin, WANG A C. On the origin of contact-electrification[J]. Materials Today, 2019, 30:34-51.
[55] 赵古田. 固液界面双电层结构的理论与实验研究[D]. 南京:东南大学, 2014. ZHAO Gutian. Theoretical and experimental study on electric double layer structure near solid-liquid interface[D]. Nanjing:Southeast University, 2014.
[56] OLTHUIS W, SCHIPPERS B, EIJKEL J, et al. Energy from streaming current and potential[J]. Sensors and Actuators B:Chemical, 2005, 111:385-389.
[57] DONATH E, VOIGT A. Streaming current and streaming potential on structured surfaces[J]. Journal of Colloid and Interface Science, 1986, 109(1):122-139.
[58] WU Jun, WANG Xiaoli, LI Hanqing, et al. Insights into the mechanism of metal-polymer contact electrification for triboelectric nanogenerator via first-principles investigations[J]. Nano Energy, 2018, 48:607-616.
[59] MARINOVA K G, ALARGOVA R G, DENKOV N D, et al. Charging of oil-water interfaces due to spontaneous adsorption of hydroxyl ions[J]. Langmuir, 1996, 12(8):2045-2051.
[60] LIN Shiquan, XU Liang, WANG A C, et al. Quantifying electron-transfer in liquid-solid contact electrification and the formation of electric double-layer[J]. Nature Communications, 2020, 11(1):399.
[61] XU Cheng, ZI Yunlong, WANG A C, et al. On the electron-transfer mechanism in the contact-electrification effect[J]. Advanced Materials, 2018, 30(15):1706790.
[62] WANG Zhonglin. On the first principle theory of nanogenerators from Maxwell's equations[J]. Nano Energy, 2020, 68:104272.
[63] 张弛, 付贤鹏, 王中林. 摩擦纳米发电机在自驱动微系统研究中的现状与展望[J]. 机械工程学报, 2019, 55(7):89-101. ZHANG Chi, FU Xianpeng, WANG Zhonglin. Review and prospect of triboelectric nanogenerators in self-powered microsystems[J]. Journal of Mechanical Engineering, 2019, 55(7):89-101.
[64] WANG Zhonglin. On Maxwell's displacement current for energy and sensors:the origin of nanogenerators[J]. Materials Today, 2017, 20(2):74-82.
[65] WANG Zhonglin, JIANG Tao, XU Liang. Toward the blue energy dream by triboelectric nanogenerator networks[J]. Nano Energy, 2017, 39:9-23.
[66] YANG Lei, WANG Yunfei, GUO Yanjie, et al. Robust working mechanism of water droplet-driven triboelectric nanogenerator:triboelectric output versus dynamic motion of water droplet[J]. Advanced Materials Interfaces, 2019, 6(24):1901547.
[67] LIN Zonghong, CHENG Gang, LEE S, et al. Harvesting water drop energy by a sequential contact-electrification and electrostatic-Induction process[J]. Advanced Materials, 2014, 26(27):4690-4696.
[68] YANG Xiya, CHAN Zeyan, WANG Lingyun, et al. Water tank triboelectric nanogenerator for efficient harvesting of water wave energy over a broad frequency range[J]. Nano Energy, 2018, 44:388-398.
[69] PARK H R, LEE J W, KIM D S, et al. Arrangement optimization of water-driven triboelectric nanogenerators considering capillary phenomenon between hydrophobic surfaces[J]. Scientific Reports, 2020, 10(1):818-823.
[70] CHEN Yun, KUANG Yicheng, SHI Dachuang, et al. A triboelectric nanogenerator design for harvesting environmental mechanical energy from water mist[J]. Nano Energy, 2020, 73:104765.
[71] DING Jing, TAO Wenquan, FAN S K. Study of vibrational droplet triboelectric nanogenerator on structural and operational parameters[J]. Nano Energy, 2020, 70:104473.
[72] LIU Wenbo, XU Liang, BU Tianzhao, et al. Torus structured triboelectric nanogenerator array for water wave energy harvesting[J]. Nano Energy, 2019, 58:499-507.
[73] AJI A S, NISHI R, AGO H, et al. High output voltage generation of over 5 V from liquid motion on single-layer MoS₂[J]. Nano Energy, 2020, 68:104370.
[74] LU Yuanchao, WU Hui, YANG Qunqing, et al. A filter paper-based nanogenerator via water-drop flow[J]. Advanced Sustainable Systems, 2019, 3(8):1900012.
[75] BU Tianzhao, YANG Hang, LIU Wenbo, et al. Triboelectric effect-driven liquid metal actuators[J]. Soft Robotics, 2019, 6(5):664-670.
[76] JIANG Peng, ZHANG Lei, GUO Hengyu, et al. Signal output of triboelectric nanogenerator at oil-water-solid multiphase interfaces and its application for dual-signal chemical sensing[J]. Advanced Materials, 2019, 31(39):1902793.
[77] MASLIYAH J H, BHATTACHARJEE S. Electrokinetic and colloid transport phenomena[M]. New Jersey:John Wiley & Sons Inc, 2006.
[78] RINALDI L, MARELLI M. The use of number words in natural language obeys Weber's law[J]. Journal of Experimental Psychology:General, 2020, 149(7):1215-1230.
[79] MISYURA S Y. The effect of Weber number, droplet sizes and wall roughness on crisis of droplet boiling[J]. Experimental Thermal and Fluid Science, 2017, 84:190-198.
[80] 姚一娜, 李聪, 陶振翔, 等. 液滴碰撞倾斜壁面的动力学特性[J]. 清华大学学报, 2019, 59(2):129-134. YAO Yina, LI Cong, TAO Zhenxiang, et al. Experimental study of the dynamic characteristics of an oblique impact of a water droplet[J]. Journal of Tsinghua University, 2019, 59(2):129-134.
[81] 薛健. 压力对固体表面润湿性的影响研究[D]. 南京:南京大学, 2014. XUE Jian. Study on the effect of pressure on the wettability of solid surface[D]. Nanjing:Nanjing University, 2014.
[82] MARMUR A, KOJEVNIKOVA S. Super-hydrophobic surfaces:methodological considerations for physical design[J]. Journal of Colloid and Interface Science, 2020, 568:148-154.
[83] WU Xintian. Wetting transition in the McCoy-Wu model[J]. Annals of Physics, 2020, 418:168166.
[84] 柯清平, 李广录, 郝天歌, 等. 超疏水模型及其机理[J]. 化学进展, 2010, 22(Z1):284-290. KE Qingping, LI Guanglu, HAO Tiange, et al. Superhydrophobicity theoretical models and mechanism[J]. Progress in Chemistry, 2010, 22(Z1):284-290.
[85] MIWA M, NAKAJIMA A, FUJISHIMA A, et al. Effects of the surface roughness on sliding angles of water droplets on superhydrophobic surfaces[J]. Langmuir, 2000, 16(13):5754-5760.
[86] NAKAJIMA A, HASHIMOTO K, WATANABE T, et al. Transparent superhydrophobic thin films with self-cleaning properties[J]. Langmuir, 2000, 16(17):7044-7047.
[87] LACKS D J, SANKARAN R M. Contact electrification of insulating materials[J]. Journal of Physics D:Applied Physics, 2011, 44(45):453001.
[88] BRYK P, KORCZENIEWSKI E, SZYMAŃSKI G S, et al. What is the value of water contact angle on silicon?[J]. Materials, 2020, 13(7):1554.
[89] CHUNG C K, KE K H. High contact surface area enhanced Al/PDMS triboelectric nanogenerator using novel overlapped microneedle arrays and its application to lighting and self-powered devices[J]. Applied Surface Science, 2020, 508:145310.
[90] CHUNG J, HEO D, KIM B, et al. Superhydrophobic water-solid contact triboelectric generator by simple spray-on fabrication method[J]. Micromachines, 2018, 9(11):593.
[91] CUI Siwen, ZHENG Youbin, LIANG Jun, et al. Conducting polymer PPy nanowire-based triboelectric nanogenerator and its application for self-powered electrochemical cathodic protection[J]. Chemical Science, 2016, 7(10):6477-6483.
[92] NIU Simiao, WANG Zhonglin. Theoretical systems of triboelectric nanogenerators[J]. Nano Energy, 2015, 14:161-192.
[93] JANI A M M, LOSIC D, VOELCKER N H. Nanoporous anodic aluminium oxide:Advances in surface engineering and emerging applications[J]. Progress in Materials Science, 2013, 58(5):636-704.
[94] 刘欢, 周震, 刘惠兰, 等. ICP刻蚀硅形貌控制研究[J]. 传感技术学报, 2011, 24(2):200-203. LIU Huan, ZHOU Zhen, LIU Huilan, et al. The study on the morphology control of silicon etching by ICP[J]. Chinese Journal of Sensors and Actuators, 2011, 24(2):200-203.
[95] LI Jingjie, CHENG Xinhong, WANG Qian, et al. Morphology improvement of SiC trench by inductively coupled plasma etching using Ni/Al₂O₃ bilayer mask[J]. Materials Science in Semiconductor Processing, 2017, 67:104-109.
[96] BHARDWAJ N, KUNDU S C. Electrospinning:A fascinating fiber fabrication technique[J]. Biotechnology Advances, 2010, 28(3):325-347.
[97] ZHAO Pengfei, SOIN N, PRASHANTHI K, et al. Emulsion electrospinning of polytetrafluoroethylene (PTFE) nanofibrous membranes for high-performance triboelectric nanogenerators[J]. ACS Applied Materials & Interfaces, 2018, 10(6):5880-5891.
[98] FENG Yan, XIONG Tianrou, JIANG Shaohua, et al. Mechanical properties and chemical resistance of electrospun polyterafluoroethylene fibres[J]. RSC Advances, 2016, 6(29):24250-24256.
[99] HU Jue, PRABHAKARAN M P, TIAN Lingling, et al. Drug-loaded emulsion nanofibers:Characterization, drug release and in vitro biocompatibility[J]. RSC Advances, 2015, 5(121):100256-100267.
[100] YAZGAN G, POPA A M, ROSSI R M, et al. Tunable release of hydrophilic compounds from hydrophobic nanostructured fibers prepared by emulsion electrospinning[J]. Polymer, 2015, 66:268-276.
[101] AGARWAL S, GREINER A. On the way to clean and safe electrospinning-green electrospinning:Emulsion and suspension electrospinning[J]. Polymers for Advanced Technologies, 2011, 22(3):372-378.
[102] LEE D H, PARK K H, HONG L Y, et al. SiCN ceramic patterns fabricated by soft lithography techniques[J]. Sensors and Actuators A:Physical, 2007, 135(2):895-901.
[103] 车友新. 基于微转移软印刷技术构筑微纳图案的研究[D]. 无锡:江南大学, 2017. CHE Youxin. Construction of micro-nanopatterns based on microtransfer molding of soft lithography[D]. Wuxi:Jiangnan University, 2017.
[104] 赵小立, 董申, 于海涛. 软印刷技术[J]. 微纳电子技术, 2006(1):55-63. ZHAO. Xiaoli, DONG Shen, YU Haitao. Soft lithography[J]. Micronanoelectronic Technology, 2006(1):55-63.
[105] WANG Zhe, CHENG Li, ZHENG Youbin, et al. Enhancing the performance of triboelectric nanogenerator through prior-charge injection and its application on self-powered anticorrosion[J]. Nano Energy, 2014, 10:37-43.
[106] WANG Sihong, XIE Yannan, NIU Simiao, et al. Maximum surface charge density for triboelectric nanogenerators achieved by ionized-air injection:Methodology and theoretical understanding[J]. Advanced Materials, 2014, 26(39):6720-6728.
[107] LIU Wenlin, WANG Zhao, WANG Gao, et al. Integrated charge excitation triboelectric nanogenerator[J]. Nature Communications, 2019, 10(1):1426.
[108] 王中林, 林龙, 陈俊, 等. 摩擦纳米发电机[M]. 北京:科学出版社, 2017. WANG Zhonglin, LIN Long, CHEN Jun, et al. Triboelectric nanogenerators[M]. Beijing:Science Press, 2017.
[109] INDIRA S S, VAITHILINGAM C A, ORUGANTI K S P, et al. Nanogenerators as a sustainable power source:state of art, applications, and challenges[J]. Nanomaterials, 2019, 9(5):773.
[110] WANG Zhonglin. Entropy theory of distributed energy for internet of things[J]. Nano Energy, 2019, 58:669-672.
[111] AHMED A, HASSAN I, ELKADY M F, et al. Integrated triboelectric nanogenerators in the era of the internet of things[J]. Advanced Science, 2019, 6(24):1802230.
[112] 倪晋仁, 王光谦, 张红武. 固液两相流基本理论及其最新应用[M]. 北京:科学出版社, 1991. NI Jinren, WANG Guangqian, ZHANG Hongwu. Basic theories and recent progress for two-phase flows[M]. Beijing:Science Press, 1991.