低温等离子体表面强化技术研究进展

doi:10.3901/JME.2021.12.192

摘要/Abstract

摘要： 简要介绍等离子体的相关概念和分类，根据等离子体电极结构、放电特性不同将等离子体分为热等离子体和温和等离子体，并对比两种等离子体表面强化技术的异同点。在此基础上，从当前研究进展和存在的关键科学技术问题两个角度，梳理热等离子体喷涂技术在制备热障涂层、耐磨涂层、梯度功能材料等领域的应用，对温和等离子体表面强化技术（等离子体物理气相沉积、等离子体化学气相沉积以及冷等离子体）在纳米纤维改性、高压绝缘、生物医学等领域的应用进展进行了综述。最后，从等离子体产生技术、表面强化技术应用以及微观-宏观过程控制三个角度分析了等离子体表面强化技术的未来发展方向，对等离子体表面强化技术的多学科发展融合和综合利用提供一定的参考。

关键词: 低温等离子体表面强化, 热等离子体喷涂, 热障涂层, 耐磨涂层, 生物医学

Abstract: The plasma concepts and classifications have been briefly introduced. The plasma sources are classified into thermal plasma and mild plasma from the concepts of electrode structures and discharge properties. Besides, their individual applications for surface strengthening are compared. Moreover, the application of thermal plasma spraying in aerospace, machinery manufacturing and preparation of gradient functional materials and the application of mild plasma surface treatment(Plasma assisted physical vapor deposition, plasma enhanced chemical vapor deposition and cold plasma) in nanofiber modification, high-voltage insulation and bio-medical area are summarized. Finally, the future development of plasma strengthening technology is analyzed from three perspectives:plasma generation technology, various application and process control. This paper will certainly helpful for multi-disciplinary and comprehensive application of plasma surface strengthening technology.

Key words: low temperature plasma surface strengthening, thermal plasma spraying, thermal barrier coating, wear-resistant coating, biomedicine

中图分类号:

TG668

王瑞雪, 叶巴丁, 孔祥号, 夏章川, 张子鹏, 李好义, 谢鹏程. 低温等离子体表面强化技术研究进展[J]. 机械工程学报, 2021, 57(12): 192-207.

WANG Ruixue, YE Bading, KONG Xianghao, XIA Zhangchuan, ZHANG Zipeng, LI Haoyi, XIE Pengcheng. Research Progress of Low Temperature Plasma Surface Strengthening Technology[J]. Journal of Mechanical Engineering, 2021, 57(12): 192-207.

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