关键词: 驱动技术, 微执行器, 新型功能材料

Abstract: Microactuator droved new type functional material is one of key technologies of precision machining, ultraprecision machining and micro-machinery. Study on microactuator’s drive element, structural design, precision control, machining and manufacturing, and so on, is with significance and use value. Outstanding properties of piezoelectric material, shape memory alloy and magnetostriction, and driving principle and design feature of microactuator droved above materials is analyzed respectively. Development trend of microactuator technology droved functional material is expounded, and key technologies of development of microactuator droved functional material are indicated.

Key words: Driving technology, Microactuator, New type functional material