能量场辅助激光诱导等离子体加工透明硬脆材料的研究现状及发展趋势

doi:10.3901/JME.2024.09.254

机械工程学报 ›› 2024, Vol. 60 ›› Issue (9): 254-272.doi: 10.3901/JME.2024.09.254

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能量场辅助激光诱导等离子体加工透明硬脆材料的研究现状及发展趋势

江安娜^1,2, 言兰^1,2, 王宁昌³, 姜峰^2,4,5, 李卓^2,4, 温秋玲^2,4, 卢希钊¹, 黄辉^1,2,5

1. 华侨大学机电及自动化学院厦门 361021;
2. 脆性材料产品智能制造技术国家地方联合工程研究中心厦门 361021;
3. 高性能工具全国重点实验室(郑州磨料磨具磨削研究所有限公司) 郑州 450000;
4. 华侨大学制造工程研究院厦门 361021;
5. 高性能工具全国重点实验室(华侨大学) 厦门 361021

收稿日期:2023-07-06 修回日期:2024-01-16 出版日期:2024-05-05 发布日期:2024-06-18
作者简介:江安娜，女， 1998 年出生。主要研究方向为激光诱导等离子体加工技术。E-mail： 1547794036@qq.com;言兰(通信作者)，女， 1981 年出生，副教授，硕士研究生导师。主要研究方向为精密超精密加工技术、数值仿真技术。E-mail： yanlan@hqu.edu.cn
基金资助:
国家重点研发计划资助项目(2023YFB3407200)。

Research Status and Development Trends for Energy Field-assisted Laser Induced Plasma-assisted Ablation of Transparent Brittle Materials

JIANG Anna^1,2, YAN Lan^1,2, WANG Ningchang³, JIANG Feng^2,4,5, LI Zhuo^2,4, WEN Qiuling^2,4, LU Xizhao¹, HUANG Hui^1,2,5

1. College of Mechanical Engineering and Automation, Huaqiao University, Xiamen 361021;
2. National and Local Joint Engineering Research Center for Intelligent Manufacturing Technology of Brittle Material Products, Xiamen 361021;
3. State Key Laboratory of High Performance Tools, Zhengzhou Research Institute for Abrasives & Grinding Co. Ltd., Zhengzhou 450000;
4. Institute of Manufacturing Engineering, Huaqiao University, Xiamen 361021;
5. State Key Laboratory of High Performance Tools, Huaqiao University, Xiamen 361021

Received:2023-07-06 Revised:2024-01-16 Online:2024-05-05 Published:2024-06-18

摘要/Abstract

摘要： 能量场辅助激光诱导等离子体加工技术是一种新兴的制造技术。基于传统的激光加工技术，通过引入热场、电场、磁场、化学场等能场进行创新，提高激光加工过程的可控性，不仅实现了透明硬脆材料纳米级甚至亚纳米级高精度制造，也有利于满足超精密制造的高质量、低损伤要求。从热场、磁场、电场、化学场分别具体阐述了不同的能量场辅助对激光加工技术的影响，通过分析激光机理和能量场辅助机理总结热场、电场、磁场和化学场对激光加工中的热能、光能、动能和表面能的影响原理，并介绍了能量场辅助激光加工的设备及工艺方法，最后总结能量场辅助激光加工技术目前存在的不足及未来面临的挑战，为进一步发展多能场复合辅助激光诱导等离子体加工技术奠定基础。

关键词: 透明硬脆材料, 电场辅助激光加工, 磁场辅助激光加工, 热场辅助激光加工, 化学场辅助激光加工

Abstract: Energy field-assisted laser processing technology is a developing manufacturing technique that combines traditional laser processing with innovative approaches involving thermal, electric, magnetic, and chemical fields to enhance the controllability of the laser machining process. This integration has not only enabled the high-precision manufacturing of transparent hard brittle materials at the nano and even sub-nano scale but has also been beneficial in meeting the stringent requirements of ultra-precision manufacturing, ensuring high quality and low damage. A specific elucidation of the effects of different energy field assistance, namely thermal, magnetic, electric, and chemical fields, on laser processing technology is provided. Through an analysis of the laser mechanism and the principles of energy field assistance, the impact of thermal, electric, magnetic, and chemical fields on thermal energy, optical energy, kinetic energy, and surface energy within laser processing is summarized. Moreover, the equipment and process methods employed in energy field-assisted laser processing are introduced. Finally, an overview of the current limitations and future challenges facing energy field-assisted laser processing technology, laying the groundwork for further development of multi-field composite-assisted laser processing techniques is presented.

Key words: transparent hard brittle materials, electric field assisted laser processing, magnetic field assisted laser processing, thermal field assisted laser processing, chemical field assisted laser processing

中图分类号:

V261
TB321

江安娜, 言兰, 王宁昌, 姜峰, 李卓, 温秋玲, 卢希钊, 黄辉. 能量场辅助激光诱导等离子体加工透明硬脆材料的研究现状及发展趋势[J]. 机械工程学报, 2024, 60(9): 254-272.

JIANG Anna, YAN Lan, WANG Ningchang, JIANG Feng, LI Zhuo, WEN Qiuling, LU Xizhao, HUANG Hui. Research Status and Development Trends for Energy Field-assisted Laser Induced Plasma-assisted Ablation of Transparent Brittle Materials[J]. Journal of Mechanical Engineering, 2024, 60(9): 254-272.

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能量场辅助激光诱导等离子体加工透明硬脆材料的研究现状及发展趋势

Research Status and Development Trends for Energy Field-assisted Laser Induced Plasma-assisted Ablation of Transparent Brittle Materials

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