• CN:11-2187/TH
  • ISSN:0577-6686

机械工程学报 ›› 2019, Vol. 55 ›› Issue (2): 10-17.doi: 10.3901/JME.2019.02.010

• 仪器科学与技术 • 上一篇    下一篇

基于DVD光学读取头的悬臂式低频加速度计

李瑞君1, 常振鑫1, 雷英俊1, 胡鹏浩1, 范光照1,2   

  1. 1. 合肥工业大学仪器科学与光电工程学院 合肥 230009;
    2. 大连理工大学机械工程学院 大连 116024
  • 收稿日期:2018-02-10 修回日期:2018-07-20 出版日期:2019-01-20 发布日期:2019-01-20
  • 通讯作者: 李瑞君(通信作者),男,1976年出生,博士,副教授,硕士研究生导师。主要研究方向为微纳米测量技术、精密仪器及光电检测技术。E-mail:rj-li@hfut.edu.cn
  • 作者简介:常振鑫,女,1995年出生。主要研究方向为微纳米测量技术。E-mail:chang214102@163.com
  • 基金资助:
    国家自然科学基金面上资助项目(51475133,51675157)

Low-frequency Accelerometer Based on DVD Pick-up Head and Cantilever

LI Ruijun1, CHANG Zhenxin1, LEI Yingjun1, HU Penghao1, FAN Guangzhao1,2   

  1. 1. School of Instrument Science and Opto-electronics Engineering, Hefei University of Technology, Hefei 230009;
    2. School of Mechanical Engineering, Dalian University of Technology, Dalian 116024
  • Received:2018-02-10 Revised:2018-07-20 Online:2019-01-20 Published:2019-01-20

摘要: 低频振动对高精度加工和测量都有严重不利影响,被动隔振方法无法有效减小低频振动,精确测量低频振动是主动隔振的前提。研制了一种基于DVD光学读取头的悬臂式低频加速度计。介绍了低频加速度计的检测原理和结构;将市售DVD光学读数头改装成了高精度位移传感器;在分析和反复优化的基础上确定了悬臂梁式弹簧片合适的材料和结构参数。以自制振动台为振源,高精度低漂移的电涡流传感器(分辨率0.07 nm)作为基准,对所研制的加速度计进行了标定,结果为灵敏度9.26 V/g,频率响应范围3~10 Hz,加速度测量范围0.4~32.8 mg,10次测量标准差优于0.01 mg,共振频率44 Hz。可以用于低频微小振动的检测。

关键词: DVD光学读取头, 低频, 加速度计, 微振动, 悬臂梁

Abstract: Low-frequency vibration has a destructive impact on high-precision machining and measurement, which is difficult to be reduced effectively by passive isolation. High precision measurement for low-frequency vibration is the first step of active isolation. A cantilever type low-frequency acceleration sensor based on DVD optical pickup is proposed. The design principle and structure of low-frequency accelerator are introduced. A high precision displacement sensor is modified from DVD pickup head. An elastic cantilever beam is used to sensor the vibration,which was analyzed and optimized iteratively and the proper material, sizes and natural frequency of the beam were obtained. The signal processing circuits are also finished. A homemade vibration generator is used as an exciter, and a high-precision eddy current sensor is used as a standard. The experimental results show that the accelerometer has a sensitivity of 9.26 V/g, a measuring frequency of 3~10 Hz, a measurement range of 0.4~32.8 mg, a measurement standard deviation of less than 0.01 mg, and a resonance of 44 Hz. It can be used to detect the low frequency micro vibrations.

Key words: accelerometer, cantilever beam, DVD pickup head, low frequency, micro-vibration

中图分类号: