一种气浮无接触输运系统建模及控制策略研究

doi:10.3901/JME.2023.22.457

机械工程学报 ›› 2023, Vol. 59 ›› Issue (22): 457-466.doi: 10.3901/JME.2023.22.457

• 交叉与前沿 • 上一篇

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一种气浮无接触输运系统建模及控制策略研究

钟伟¹, 赵忠宇¹, 吕明明¹, 李冲¹, 原辰次²

1. 江苏科技大学机械工程学院镇江 212028;
2. 东京工业大学系统与控制工程系东京 113-8654 日本

收稿日期:2022-12-06 修回日期:2023-05-08 出版日期:2023-11-20 发布日期:2024-02-19
通讯作者: 钟伟(通信作者)，男，1983年出生，博士，教授，硕士研究生导师。主要研究方向为气压传动及控制、气体润滑理论与应用技术。E-mail：zhongwei@just.edu.cn
作者简介:赵忠宇，男，1996年出生，硕士研究生。主要研究方向气压传动及控制。E-mail：1902814350@qq.com
基金资助:
国家自然科学基金资助项目(51675247)。

Investigation of Modeling and Control for Transporting and Positioning Planar Object on Contactless Air Conveyor

ZHONG Wei¹, ZHAO Zhongyu¹, Lü Mingming¹, LI Chong¹, HARA Shinji²

1. School of Mechanical Engineering, Jiangsu University of Science and Technology, Zhenjiang 212028;
2. Systems and Control Engineering, Tokyo Institute of Technology, Tokyo 113-8654, Japan

Received:2022-12-06 Revised:2023-05-08 Online:2023-11-20 Published:2024-02-19

摘要/Abstract

摘要： 为满足硅片、食品等行业运输易损或清洁产品的需要，提出一种完全无接触式气浮输运系统。该系统通过气膜将物体与输运装置表面分离并利用气体流动产生的黏性牵引效果来移动物体。基于计算流体动力学(Computational fluid dynamics，CFD)数值仿真揭示的流场情况对输运平台表面区域进行划分，在此基础上建立承载力和黏性力的理论模型。构建试验装置分别测量悬浮高度及黏性力相对于吸气流量的关系，悬浮高度随吸气流量增加而降低，黏性力随吸气流量增加而增大，仿真与试验结果对比表明承载力与黏性力理论模型准确有效，平均误差小于5%。针对一维位置控制，设计基于回路成形方法的H∞鲁棒控制器，选取4种不同尺寸和重量的物体进行输运试验。结果显示，输运物体均能够被移动到目标位置，静态定位误差小于 0.5 mm。H∞鲁棒控制器能够保证定位控制的稳定性，与应用PID控制器的阶跃响应结果对比表明其能够有效减小静态误差。

关键词: 气浮输运, 无接触, 黏性力, H_∞鲁棒控制

Abstract: Many industries require contactless transport of delicate or clean products such as silicon wafers, flat foodstuffs. To satisfy the requirements, an utterly contact-less air conveyor system that separates the object and the conveyor surface by a thin film and moves the object by the viscous traction effect of gas flow has been proposed. The surface region of the transport platform is divided based on the flow field revealed by computational fluid dynamics(CFD) numerical simulation, and on this basis, a theoretical model for bearing force and viscous force is established. Experimental devices are established to measure the relationship between the floating height and viscous force relative to the suction flow rate. The floating height decreases with the suction flow rate, while the viscous force increases with the suction flow rate. The comparison between simulation and experimental results showed that the theoretical model of bearing capacity and viscous force is accurate and effective, with an average error of less than 5%. An H∞ robust controller is designed based on the loop shaping method for 1D-position control, and four different sizes and weights of objects are selected for transportation experiments. The results show that all transported objects can be moved to the target position, and the steady-state positioning error was within 0.5 mm The H∞ robust controller can ensure the stability of the positioning control, and the comparison with the step response results of a PID controller shows that it can effectively reduce static errors.

Key words: air conveyor, contactless, viscous force, H_∞ robust control

中图分类号:

TH138

钟伟, 赵忠宇, 吕明明, 李冲, 原辰次. 一种气浮无接触输运系统建模及控制策略研究[J]. 机械工程学报, 2023, 59(22): 457-466.

ZHONG Wei, ZHAO Zhongyu, Lü Mingming, LI Chong, HARA Shinji. Investigation of Modeling and Control for Transporting and Positioning Planar Object on Contactless Air Conveyor[J]. Journal of Mechanical Engineering, 2023, 59(22): 457-466.

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一种气浮无接触输运系统建模及控制策略研究

Investigation of Modeling and Control for Transporting and Positioning Planar Object on Contactless Air Conveyor

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