基于时变磁场类多普勒效应的位移测量方法

doi:10.3901/JME.2017.18.018

机械工程学报 ›› 2017, Vol. 53 ›› Issue (18): 18-25.doi: 10.3901/JME.2017.18.018

扫码分享

基于时变磁场类多普勒效应的位移测量方法

鲁进^1,2, 陈锡侯², 汤其富², 武亮²

1. 重庆理工大学机械工程学院重庆 400054;
2. 重庆理工大学时栅传感及先进检测技术重庆市重点实验室重庆 400054

收稿日期:2016-09-19 修回日期:2017-02-20 出版日期:2017-09-20 发布日期:2017-09-20
通讯作者: 鲁进(通信作者),女,1980年出生,副教授,硕士研究生导师.主要研究方向为精密测量及智能传感器.E-mail:jinlu@cqut.edu.cn
基金资助:
国家自然科学基金（51505052，51675071）和重庆市科技研发基地能力提升计划（cstc2014pt-sy40002）资助项目。

Displacement Measurement Method Based on Doppler-like Effect in Time-varying Magnetic Field

LU Jin^1,2, CHEN Xihou², TANG Qifu², WU Liang²

1. College of Mechanical Engineering, Chongqing University of Technology, Chongqing 400054;
2. Chongqing Key Laboratory of Time-Grating Sensing and Advanced Testing Technology, Chongqing University of Technology, Chongqing 400054

Received:2016-09-19 Revised:2017-02-20 Online:2017-09-20 Published:2017-09-20

摘要/Abstract

摘要： 提出一种基于时变磁场类多普勒效应的位移测量方法。该方法通过在特定平面内布置带电导体，建立特定方向匀速移动的正弦分布时变磁场，利用被测运动使时变磁场内感应线圈的输出信号产生类多普勒频差，再通过测量频差解算出被测运动的位移。根据测量原理建立有限元模型对正弦时变磁场分布和感应信号频差进行模拟仿真。仿真结果表明：正弦分布磁场移动速度均匀，频差所对应的时间差累加与位移呈线性关系，线性度误差小于0.2%。根据仿真模型，采用多层印制电路板工艺设计并制作了位移传感器样机，进行类多普勒频差观察试验和位移测量精度比对试验。试验结果表明：时变磁场中感应线圈运动时产生明显的类多普勒频移，频差与运动速度呈线性关系；基于类多普勒效应的位移传感器可以有效地进行位移测量，在对定尺和动尺的加工和安装偏差、激励源及测量电路的电气偏差进行标定和修正后，传感器在200 mm的测量范围内，测量误差优于1µm。研究为低成本实现精密位移测量提供了一种可行的解决方案和可靠的理论依据。

关键词: 传感器, 类多普勒效应, 时变磁场, 位移测量

Abstract: A displacement measurement method based on Doppler-like effect in time-varying magnetic field is proposed. It builds a sine-distributed time-varying magnetic field which moves in a particular direction. A Doppler-like frequency shift occurs in the output of induction coils when it is moving in the special magnetic field. The difference in frequency can be measured and then the displacement of the moving object can be calculated. Finite element models are built according to the measuring principle to simulate the distribution of the time-varying magnetic field and the Doppler-like frequency shift. Simulation shows that the sine shape distribution of time-varying magnetic field was moving at a constant velocity, and the sum of the difference in time caused by Doppler-like frequency shift has a linear relationship with the displacement of the moving coils. Nonlinear Error is less than 0.2% in one pitch in this simulation. Multi-layer printed circuit board technology has been employed to design and manufacture the displacement sensor prototype based on the simulation model. And then experiments of Doppler-like effect and displacement measurement accuracy have been taken. Accuracy of the displacement sensor based on Doppler-like effect reached 1µm in a 200 mm range, after a calibration taken to correct the deviation caused by manufacture and installation of sensor and the electrical bias caused by excitation source and measurement circuit. A low cost solution and related theory are provided to realize precise displacement measurement.

Key words: displacement measurement, Doppler-like effect, sensor, time-varying magnetic field

中图分类号:

鲁进, 陈锡侯, 汤其富, 武亮. 基于时变磁场类多普勒效应的位移测量方法[J]. 机械工程学报, 2017, 53(18): 18-25.

LU Jin, CHEN Xihou, TANG Qifu, WU Liang. Displacement Measurement Method Based on Doppler-like Effect in Time-varying Magnetic Field[J]. Journal of Mechanical Engineering, 2017, 53(18): 18-25.

参考文献

[1] DZIWINSKI T. A novel approach of an absolute encoder coding pattern[J]. IEEE Sensors Journal, 2015, 15(1):397-401.
[2] NAQUI J, MARTÍN F. Angular displacement and velocity sensors based on electric-LC (ELC) loaded microstrip lines[J]. IEEE Sensors Journal, 2014, 14(4):939-940.
[3] NAQUI J, MARTÍN F. Transmission lines loaded with bisymmetric resonators and their appocation to angular displacement and velocity sensors[J]. IEEE Transactions on Microwave Theory and Techniques, 2013, 61(12):4700-4713.
[4] HORESTANI A K, ABBOTT D, FUMEAUX C. Rotation sensor based on horn-shaped split ring resonator[J]. IEEE Sensors Journal, 2013, 13(8):3014-3015.
[5] BARTSCH H, GEILING T, MÜLLER J. A LTCC low-loss inductive proximity sensor for harsh environments[J]. Sensors and Actuators A:Physical, 2012, (175):28-34.
[6] ASCHENBRENNER B, ZAGAR B G. Analysis and validation of a planar high-frequency contactless absolute inductive position sensor[J]. IEEE Transactions on Instrumentation and Measurement, 2015(3):768-775.
[7] FLEMING A J. A review of nanometer resolution position sensors:Operation and performance[J]. Sensors and Actuators A:Physical, 2013, 190:106-126.
[8] HWANG S H, KIM H J, KIM J M, et al. Compensation of amplitude imbalance and imperfect quadrature in tesolver signals for PMSM drives[J]. IEEE Transactions on Industry Applications, 2011, 47(1):134-143.
[9] HOSEINNEZHAD R, BAB-HADIASHAR A, HARDING P. Calibration of resolver sensors in electromechanical braking systems:A modified recursive weighted least-squares approach[J]. IEEE Transactions on Industrial Electronics, 2007, 54(2):1052-1060.
[10] SARMA S, VENKATESWARALU A. Systematic error cancellations and fault detection of resolver angular sensor using a DSP based system[J]. Mechatronics, 2009, 19(8):1303-1312.
[11] TANG Q F, PENG D L, WU L, et al. An inductive angular displacement sensor based on planar coil and contrate rotor[J]. IEEE Sensors Journal, 2015, 15(7):3947-3954.
[12] 赵世杰, 张鹏, 张永芹, 等. 基于激光回馈效应的多普勒测速技术[J]. 激光技术, 2012, 36(2):160-164. ZHAO Shijie, ZHANG Peng, ZHANG Yongqin, et al. Velocity measurement techniques based on laser feedback effct[J]. Laser Technology, 2012, 36(2):160-164.
[13] 张澍, 李玉, 卢广锋. 基于双频环形激光器的激光多普勒测振系统研究[J]. 光学学报, 2016, 36(3):312003. ZHANG Shu, LI Yu, LU Guangfeng. Reaearch of laser Doppler vibrometer based on dual-frequency ring laser[J]. Acta Optica Sinica, 2016, 36(3):312003.
[14] IHARA T, TSUZUKI N, KIKURA H. Application of ultrasonic Doppler velocimetry to molten glass by using broadband phase difference method[J]. Flow Measurement and Instrumentation, 2016, 48:90-96.
[15] 汤其富, 彭东林, 武亮, 等. 时栅角位移传感器中的多普勒效应影响及其抑制方法研究[J]. 仪器仪表学报, 2014, 35(3):620-626. TANG Qifu, PENG Donglin, WU Liang, et al. Study on the influence of Doppler effect and its suppressing method in time grating angular displacement sensor[J]. Chinese Journal of Scientific Instrument, 2014, 35(3):620-626.

基于时变磁场类多普勒效应的位移测量方法

Displacement Measurement Method Based on Doppler-like Effect in Time-varying Magnetic Field

PDF

可视化

摘要/Abstract

引用本文

使用本文

参考文献

相关文章 15

编辑推荐

Metrics

本文评价

[1]	王淞立, 方续东, 高博楠, 赵立波, 田边, 林启敬, 张仲恺, 饶浩, 李瑜, 蒋庄德. 硅微谐振压力传感器自动增益控制与相位补偿研究[J]. 机械工程学报, 2024, 60(4): 82-91.
[2]	赵家浩, 黄汉雄. 微乳突提高低力学刺激下微结构柔性压力传感器的性能[J]. 机械工程学报, 2024, 60(4): 222-229.
[3]	孙广开, 张兴硕, 何彦霖, 周康鹏, 祝连庆. 面向连续体机器人精密操作的多芯光纤三维形状与位置测量误差研究[J]. 机械工程学报, 2024, 60(3): 68-82.
[4]	方续东, 邓武彬, 吴祖堂, 李进, 吴晨, 前田龙太郎, 田边, 赵立波, 林启敬, 张仲恺, 韩香广, 蒋庄德. 基于惯性传感器的呼吸测量技术综述[J]. 机械工程学报, 2024, 60(20): 1-23.
[5]	李立建, 杨朋霖, 姚建涛, 李冰, 王迎佳. 柔性并联多维力传感器协同优化设计[J]. 机械工程学报, 2024, 60(19): 20-31.
[6]	赵峻林, 乔百杰, 罗现强, 符顺国, 程昊, 王亚南, 陈雪峰. 基于单传感器测量的多模态叶片动应力场预测[J]. 机械工程学报, 2024, 60(16): 19-33.
[7]	倪智宇, 李自森, 邬树楠, 吴晨晨. 基于姿态信号分布测量的空间太阳能电站惯性张量参数辨识[J]. 机械工程学报, 2024, 60(16): 209-221.
[8]	景冬, 王爽, 阳凡林, 石波, 赵广乾, 孙月文. 基于空间前方交会的船载水上下一体化测量系统多传感器坐标转换关系标定研究[J]. 机械工程学报, 2024, 60(14): 24-33,41.
[9]	周建熹, 林金帆, 洪晓斌, 杨定民. 承力索可调节力压电式阵列超声导波传感器设计与损伤检测[J]. 机械工程学报, 2024, 60(14): 42-50.
[10]	张彧, 檀祖冰, 曹东璞, 陈龙. 基于视觉和惯性测量单元的里程计关键技术研究综述[J]. 机械工程学报, 2024, 60(10): 3-21.
[11]	李颖, 王荣煊, 万成麟, 王伟达, 杨超, 徐彬. 分体式飞行汽车立体环境感知系统设计及试验研究[J]. 机械工程学报, 2024, 60(10): 102-111.
[12]	朱冰, 吕恬, 赵健, 陈志成, 吴坚. 冗余转向系统电流传感器故障诊断及容错策略[J]. 机械工程学报, 2024, 60(10): 413-424.
[13]	黄勇军, 郭强, 李山, 程福泉. 不平衡下电流源型PWM整流器无网侧电流传感器功率反馈控制策略^*[J]. 电气工程学报, 2023, 18(3): 184-195.
[14]	叶文昌, 郭必成, 邓朝晖, 王伟, 邹伶俐, 刘超, 尹刚刚, 姜峰. 刀具智能化关键技术的研究进展及发展趋势[J]. 机械工程学报, 2023, 59(23): 265-282.
[15]	黄涛, 王家畴, 李昕欣. (111)硅片的高性能热堆式气体流量传感器及其封装技术研究[J]. 机械工程学报, 2023, 59(2): 30-38.