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CN: 11-2187/TH
ISSN: 0577-6686
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Nanometer-scale Thickness Photoresist Multiple Blade Coating Process Analysis
LI Yuze, YAN Ying, HE Tao, LI Han, LI Henan, WAN Jiaqi, FANG Zikeng, GUO Dongming
Journal of Mechanical Engineering . 2026, (
13
): 410 -417 . DOI: 10.3901/JME.260704
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