• CN: 11-2187/TH
  • ISSN: 0577-6686
Numerical Modeling and Experimental Study of the Reaction Process in Silicon Epitaxial Growth Reaction Chamber
DENG Shiwei, SHEN Wenjie, CHEN Yuhong, BAI Tian, MEI Deqing, WANG Yancheng
Journal of Mechanical Engineering . 2024, (5): 209 -218 .  DOI: 10.3901/JME.2024.05.209