›› 1992, Vol. 28 ›› Issue (2): 62-64.
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Yan Renchun;Lou Mingzhu;Deng Jianggou;Cheng Dezhao
Published:
Abstract: This paper introduces the principle, measuring ways, a circuit block diagram and probe unit of measuring layer thickness by means of electro-magnetic inducing method. It is mainly discussed to correct non-linearity for layer thickness by the micro-processor.
Key words: 电磁感应, 微处理机, 误差, 校正
Yan Renchun;Lou Mingzhu;Deng Jianggou;Cheng Dezhao. THE DEVELOPMENT OF THE LAYAER THICKNESS MEASURING UNIT SWITH MICRO-PROCESSOR[J]. , 1992, 28(2): 62-64.
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