Abstract: Types of machining error of vibration beam rate sensor and their influence degree on performance are studied. This paper starts with the dynamics analysis and the mechanism of error generation. The error of gyro’s output signal caused by the technology limit is deduced theoretically, and numerical calculations are carried out for 100 mm alloyed vibration beam. Analysis results show that quadrature error is the main source error of the gyro performance, and the verticality between drive axis and sensing axis is the primary factor affecting quadrature error; the error caused by mass center deviation of vibration beam changes with angular acceleration, which can be ignored under the condition that the angular acceleration is small; the influence of parasitic coriolis error on performance is minimal, and can be neglected. Finally, the quadrature error is simulated when the deviation angle between drive axis and sensing axis in the vertical direction is 0.626 0°, which shows that the error between quadrature error and theoretical equivalent value(the output signal when the gyroscope’s rotation velocity is 2°/s)is 4.88%. The simulation results agree with the theoretical deduction results, thus proving the effectiveness of improving the performance of vibration beam rate sensor by improving the manufacturing process and reducing the verticality between drive axis and sensing axis.

Key words: Dynamic equation, Error, Vibration beam rate sensor