Abstract: Design, modeling, decoupling control, as well as experiment results of a high-precision magnetically suspended table are presented. Compared with existing designs, the magnetic suspension and the linear drive in our design are electro-magnetically separated, so that the coupling between them is minimized. Presented also are novel designs in the electromag-nets and in the arrangement of sensors, which achieves smaller power consumption even without the use of permanent magnets, and maintains redundancy in driving and sensing. This redun-dancy allows a symmetric structural design that gives uniform (and also improved) noise performance among the control axis.

Key words: Decoupling control, Magnetic bearings, Magnetic suspension, Precision motion control, Precision stage