• CN: 11-2187/TH
  • ISSN: 0577-6686

›› 2001, Vol. 37 ›› Issue (5): 78-80,8.

• Article • Previous Articles     Next Articles

LASER VISUAL INSPECTION SYSTEM AND EVALUATING METHOD FOR GRID ARRAY DEVICE COPLANARITY

Xue Xiaojie;Ye Shenghua;Sun Changku   

  1. Tianjin University
  • Published:2001-05-15

Abstract: Adopting line-structured laser sensor, successfully applies the visual inspection to the grid array device coplanarity measurement. With the mathematics model put forward, the evaluating method based on the three-point seating plane is presented, and corresponding experimental studies on the BGA chip coplanarity are carried out, which achieve satisfactory results.

Key words: Coplanarity, Grid array device, Three-point seating plane method

CLC Number: