Abstract: Based on the deformation characteristic of compliant plate, a monolithic space 3-DOF compliant parallel micro-motion stage is presented. First, the input coupling influence to the accuracy of the stage is analysed, and three different forms input coupling are discussed, a reference design range of the input coupling is presented based on the results of discussion. Second, a theoretical model of the stage is established based on the finite element method, and an optimal design method is applied in the research of the structure parameters, the optimal results are validated by the ANSYS software. Finally, the forward solution and inverse solution are also presented, and a kinematic calibration method is established based on the experimental results to increase the accuracy of the positioning stage. The research shows that the stage has nanometers positioning accuracy.

Key words: Forward solution, Input coupling, Optimal design, Positioning stage