Abstract: Computational metrology is referred to as a measurement method where a complicated measurement process is modeled as a forward problem and some measured data are obtained by a specific instrument under a certain measurement configuration, and then the measurands are precisely and accurately reconstructed by solving the corresponding inverse problem. The fundamental concept and characteristics of computational metrology are put forward, and it is pointed out that computational metrology is essentially a model-based metrology and a typical process to solve an inverse problem. The common scientific problems in computational metrology, such as the measurability, the measurement error analysis and precision estimation, the measurement configuration optimization, the fast and accurate forward modeling, and the fast and robust measurand reconstruction, and their generalized solution methods are explored, with an emphasis on the significance and necessity to apply modern mathematical theories and tools in solving the related problems. Some case studies are presented and have demonstrated that computational metrology is expected to provide a novel means for fast, low-cost, non-destructive, and accurate measurement in high-volume manufacturing.

Key words: computational metrology;model-based metrology;measurability;measurement error analysis;measurement confi-guration;model order reduction;inverse problem solving