A Review of Burr Research of Microstructures in Micro Cutting

doi:10.3901/JME.2024.21.336

Abstract

Abstract: With the rapid development of micro/nano fabrication, the microstructures of products in the medical, electronic and energy fields are becoming more and more complex and require higher precision, while the microstructures are prone to burrs in the cutting process, which greatly restricts the quality and performance of the products. Starting from the formation of burrs during the cutting of microstructures, the research status of the microstructure burr formation mechanism is discussed, and the prediction and characterization methods of microstructure burr size are introduced. The influence of factors such as cutting parameters, process planning, tool design and material modification on burr size is analyzed, and the burr control methods are summarized. The microstructure burr removal methods are classified, and the burr removal methods and effects of different microstructures are reviewed, the bottleneck problems in the removal of microstructure burrs are discussed, and the development trend of microstructure burr removal methods is pointed out.

Key words: microstructures, formation mechanism, characterization, burrs removal

CLC Number:

LEI Yu, XU Zhilong, XU Xipeng, GAO Jiashun, GUO Bicheng. A Review of Burr Research of Microstructures in Micro Cutting[J]. Journal of Mechanical Engineering, 2024, 60(21): 336-348.

References

[1] 国家自然科学基金委员会工程与材料科学部. 机械工程学科发展战略报告-2021~2035[M]. 北京：科学出版社，2021. National Natural Science Foundation of China，Department of Engineering and Materials Science. Mechanical engineering discipline development strategy report (2021-2035) [M]. Beijing：Science Press，2021.
[2] 汤勇，周明，韩志武，等. 表面功能结构制造研究进展[J]. 机械工程学报，2010，46(23)： 93-105. TANG Yong， ZHOU Ming，HAN Zhiwu，et al. Recent research on manufacturing technologies of functional surface structures [J]. Journal of Mechanical Engineering，2010，46(23)：93-105
[3] 唐恒，汤勇，伍晓宇，等. 表面功能结构制造研究的新进展与发展趋势[J]. 机械工程学报，2022，58(11)：183-199. TANG Heng，TANG Yong，WU Xiaoyu，et al. New progress and development trend of manufacturing of functional surface structure[J]. Journal of Mechanical Engineering，2022，58(11)：183-199.
[4] PSHENAY-SEVERIN E，BAE H，REICHWALD K，et al. Multimodal nonlinear endomicroscopic imaging probe using a double-core double-clad fiber and focus- combining micro-optical concept[J]. Light：Science & Applications，2021，10(1)：207.
[5] WANG H，CHEN W，ZHAO W，et al. Numerical and experimental study on the optical performance of micro- pyramid functional surfaces[J]. Microsystem Technologies，2021，27(7)：2671-2678.
[6] XU Z，XU X，CUI C. Optical functional film with triangular pyramidal texture for Crystalline silicon solar cells[J]. Solar Energy，2020，201：45-54.
[7] HUANG R，ZHANG X，NEO W K，et al. Ultra-precision machining of grayscale pixelated micro images on metal surface[J]. Precision Engineering，2018，52：211-220.
[8] 石文天，侯岩军，刘玉德，等. 微切削毛刺形成机理及研究进展综述[J]. 中国机械工程，2019，30(23)：2809-2819，2828. SHI Wentian，HOU Yanjun，LIU Yude，et al. Overview on formation mechanism and research progress of burrs in micro cutting [J]. China Mechanical Engineering，2019，30(23)：2809-2819，2828.
[9] JIN S Y，PRAMANIK A，BASAK A K，et al. Burr formation and its treatments-a review[J]. The International Journal of Advanced Manufacturing Technology，2020，107(5-6)：2189-2210.
[10] AURICH J C，DORNFELD D，ARRAZOLA P J，et al. Burrs—Analysis，control and removal[J]. CIRP Annals，2009，58(2)：519-542.
[11] LI H，XU Z. Micro-burrs in machining original molds of an optical functional film with a triangular pyramidal texture[J]. Journal of Micromechanics and Microengineering，2021，31(6)：65003.
[12] LEKKALA R，BAJPAI V，SINGH R K，et al. Characterization and modeling of burr formation in micro-end milling[J]. Precision Engineering，2011，35(4)：625-637.
[13] PANG X，LIU X，ZHANG J，et al. Investigation on the modelling and characterization of top edge burr formation in slotting finned tube[J]. The International Journal of Advanced Manufacturing Technology，2021，112(1-2)：537-551.
[14] WU Y，CHEN N，BIAN R，et al. Investigations on burr formation mechanisms in micro milling of high-aspect-ratio titanium alloy Ti-6Al-4V structures[J]. International Journal of Mechanical Sciences，2020，185：105884.
[15] WU X，LI L，HE N. Investigation on the burr formation mechanism in micro cutting[J]. Precision Engineering，2017，47：191-196.
[16] LIU X，ZHOU T，PANG S，et al. Burr formation mechanism of ultraprecision cutting for microgrooves on nickel phosphide in consideration of the diamond tool edge radius[J]. The International Journal of Advanced Manufacturing Technology，2018，94(9-12)：3929-3935.
[17] KOBAYASHI R，XU S，SHIMADA K，et al. Defining the effects of cutting parameters on burr formation and minimization in ultra-precision grooving of amorphous alloy[J]. Precision Engineering，2017，49：115-121.
[18] HASHIMURA M，HASSAMONTR J，DORNFELD D A. Effect of in-plane exit angle and rake angles on burr height and thickness in face milling operation[J]. Journal of Manufacturing Science and Engineering，1999，66(1)：85-90.
[19] 王贵成. 金属切削毛刺分类体系的研究及其应用[J]. 中国机械工程，1995(6)：40-42，78. WANG Guicheng. Research and application of metal cutting burr classification system [J]. China Mechanical Engineering，1995(6)：40-42，78.
[20] WAN Z，LI Y，TANG H，et al. Characteristics and mechanism of top burr formation in slotting microchannels using arrayed thin slotting cutters[J]. Precision Engineering，2014，38(1)：28-35.
[21] ZHANG X，YU T，WANG W，et al. Improved analytical prediction of burr formation in micro end milling[J]. International Journal of Mechanical Sciences，2019，151：461-470.
[22] KIZHAKKEN V，MATHEW J. Modeling of burr thickness in micro-end milling of Ti6Al4V[J]. Proceedings of the Institution of Mechanical Engineers，Part B：Journal of Engineering Manufacture，2019，233(4)：1087-1102.
[23] NIKNAM S A，SONGMENE V. Modeling of burr thickness in milling of ductile materials[J]. The International Journal of Advanced Manufacturing Technology，2013，66(9-12)：2029-2039.
[24] QIAO Z，QU D，WANG H，et al. Experimental investigation of the influence of chip interference on burr height in machining micro V-grooves on electroplated copper roll die[J]. Proceedings of the Institution of Mechanical Engineers，Part B：Journal of Engineering Manufacture，2018，232(8)：1491-1497.
[25] LU J，CHEN J，FANG Q，et al. Theoretical analysis and finite element simulation of Poisson burr in cutting ductile metals[J]. Simulation Modelling Practice and Theory，2016，66：260-272.
[26] DONG X，ZHOU T，PANG S，et al. Mechanism of burr accumulation and fracture pit formation in ultraprecision microgroove fly cutting of crystalline nickel phosphorus[J]. Journal of Micromechanics and Microengineering，2018，28(12)：125008.
[27] AKKOYUN F，ERCETIN A，ASLANTAS K，et al. Measurement of micro burr and slot widths through image processing：Comparison of manual and automated measurements in micro-milling[J]. Sensors，2021，21(13)：4432.
[28] REGNIER T，FROMENTIN G，MARCON B，et al. Fundamental study of exit burr formation mechanisms during orthogonal cutting of AlSi aluminium alloy[J]. Journal of Materials Processing Technology，2018，257：112-122.
[29] MEDEOSSI F，SORGATO M，BRUSCHI S，et al. Novel method for burrs quantitative evaluation in micro-milling[J]. Precision Engineering，2018，54：379-387.
[30] SHARAN R V，ONWUBOLU G C. Measurement of end-milling burr using image processing techniques[J]. Proceedings of the Institution of Mechanical Engineers，Part B：Journal of Engineering Manufacture，2011，225(3)：448-452.
[31] LI H，XU Z，JI Z，et al. Quantitative characterization of Poisson burrs on the V-shaped texture based on the volume method[J]. Journal of Materials Research and Technology，2020，9(6)：16280-16288.
[32] KISWANTO G，ZARIATIN D L，KO T J. The effect of spindle speed，feed-rate and machining time to the surface roughness and burr formation of aluminum alloy 1100 in micro-milling operation[J]. Journal of Manufacturing Processes，2014，16(4)：435-450.
[33] KUMAR V，SINGH H. Regression analysis of surface roughness and micro-structural study in rotary ultrasonic drilling of BK7[J]. Ceramics International，2018，44(14)：16819-16827.
[34] 巩亚东，张金峰，张永震，等. 微尺度高速铣削表面质量的试验研究[J]. 机械工程学报，2013，49(13)：190-198. GONG Yadong，ZHANG Jinfeng，ZHANG Yongzhen，et al. Experimental research on surface quality in the process of high-speed and micro-scale milling [J]. Journal of Mechanical Engineering，2013，49(13)：190-198.
[35] 刘书暖，夏文强，王宁，等. CFRP/Ti叠层构件钻孔工艺参数多目标优化方法[J]. 机械工程学报，2020，56(7)：193-203. LIU Shunuan，XIA Wenqiang，WANG Ning，et al. Multi-objective drilling parameters optimization method for CFRP/Ti stacks [J]. Journal of Mechanical Engineering，2020，56(7)：193-203.
[36] THAKRE A A，SONI S. Modeling of burr size in drilling of aluminum silicon carbide composites using response surface methodology[J]. Engineering Science and Technology，an International Journal，2016，19(3)：1199-1205.
[37] SHANMUGHASUNDARAM P，SUBRAMANIAN R. Study of parametric optimization of burr formation in step drilling of eutectic Al–Si alloy–Gr composites[J]. Journal of Materials Research and Technology，2014，3(2)：150-157.
[38] LI H，XU Z，PI J，et al. Precision cutting of the molds of an optical functional texture film with a triangular pyramid texture[J]. Micromachines，2020，11(3)：248.
[39] OLSSON M，PERSSON H，AGMELL M，et al. FE simulation and experimental verification of side-flow and burr formation in machining of oxygen-free copper[J]. Procedia CIRP，2018，72：1427-1432.
[40] 陈光，刘见，戈家影，等. 基于运动学及力热分析的CFRP超声振动辅助螺旋铣孔质量影响机制[J]. 机械工程学报，2021，57(1)：199-209. CHEN Guang，LIU Jian，GE Jiaying，et al. Experimental study on ultrasonic vibration helical milling of CFRP based on kinematic and thermal-mechanical analysis[J]. Journal of Mechanical Engineering，2021，57(1)：199-209.
[41] ZAI P，TONG J，LIU Z，et al. Analytical model of exit burr height and experimental investigation on ultrasonic-assisted high-speed drilling micro-holes[J]. Journal of Manufacturing Processes，2021，68：807-817.
[42] WU D，ZHANG P，WANG H，et al. Effect of cutting parameters on surface quality during diamond turning of micro-prism array[J]. Proceedings of the Institution of Mechanical Engineers，Part B：Journal of Engineering Manufacture，2017，231(3)：555-561.
[43] HUANG Y，LI S. Fabrication of micropyramid structure by fly-cutting[J]. Optical Engineering，2019，58(1)：013107.
[44] 高兴，李勇，钟昊，等. 回转对称微结构光学模具的超精密切削B轴旋转加工工艺[J]. 清华大学学报，2017，57(2)：120-127. GAO Xing，LI Yong，ZHONG Hao，et al. B axis rotating machining of microstructed optical molds with rotational symmetry based on ultra-precision cutting [J]. Journal of Tsinghua University，2017，57(2)：120-127.
[45] RAHMAN M，SENTHIL KUMAR A，SALAM M U. Experimental evaluation on the effect of minimal quantities of lubricant in milling[J]. International Journal of Machine Tools and Manufacture，2002，42(5)：539-547.
[46] PAN J，FENG K，HE L，et al. Influence of different textures on machining performance of a milling tool[J]. Advances in Materials Science and Engineering，2020，2020：1-11.
[47] SAPTAJI K，SUBBIAH S. Burr reduction of micro-milled microfluidic channels mould using a tapered tool[J]. Procedia Engineering，2017，184：137-144.
[48] SAPTAJI K，SUBBIAH S，DHUPIA J S. Effect of side edge angle and effective rake angle on top burrs in micro-milling[J]. Precision Engineering，2012，36(3)：444-450.
[49] AZIZ M，OHNISHI O，ONIKURA H. Innovative micro hole machining with minimum burr formation by the use of newly developed micro compound tool[J]. Journal of Manufacturing Processes. 2012，14(3)：224-232.
[50] AHMED F，AHMAD F，KUMARAN S T，et al. Development of cryogenic assisted machining strategy to reduce the burr formation during micro-milling of ductile material[J]. Journal of Manufacturing Processes，2023，85：43-51.
[51] FEISTLE M，KOSLOW I，KRINNINGER M，et al. Reduction of burr formation for conventional shear cutting of boron-alloyed sheets through focused heat treatment[J]. Procedia CIRP，2017，63：493-498.
[52] THANIGAIVELAN R，ARUNACHALAM R M，MADHAN C，et al. Impact of electrochemical passivation on burr suppression of Ti-4Al-6V alloy during machining[J]. Surface Engineering and Applied Electrochemistry，2019，55(4)：424-429.
[53] TOH C K. The use of ultrasonic cavitation peening to improve micro-burr-free surfaces[J]. The International Journal of Advanced Manufacturing Technology，2006，31(7-8)：688-693.
[54] FANG F Z，LIU Y C. On minimum exit-burr in micro cutting[J]. Journal of Micromechanics and Microengineering，2004，14(7)：984-988.
[55] KOLGANOVA E N，GONCHAROV V M，FEDOROV A V. Investigation of deburring process at vibro-abrasive treatment of parts having small grooves and holes[J]. Materials Today：Proceedings，2019，19：2368-2373.
[56] KO S L，BARON Y M，PARK J I. Micro deburring for precision parts using magnetic abrasive finishing method[J]. Journal of Materials Processing Technology，2007，187-188：19-25.
[57] JIAO A，ZHANG G，LIU B，et al. Study on improving hole quality of 7075 aluminum alloy based on magnetic abrasive finishing[J]. Advances in Mechanical Engineering，2020，12(6)：2072262288.
[58] KIM T，KWAK J. A study on deburring of magnesium alloy plate by magnetic abrasive polishing[J]. International Journal of Precision Engineering and Manufacturing，2010，11(2)：189-194.
[59] YIN S，SHINMURA T. Vertical vibration-assisted magnetic abrasive finishing and deburring for magnesium alloy[J]. International Journal of Machine Tools and Manufacture，2004，44(12-13)：1297-1303.
[60] MATHAI G，MELKOTE S. Effect of process parameters on the rate of abrasive assisted brush deburring of microgrooves[J]. International Journal of Machine Tools and Manufacture，2012，57：46-54.
[61] MATHAI G，MELKOTE S，Rosen D. Material removal during abrasive impregnated brush deburring of micromilled grooves in NiTi foils[J]. International Journal of Machine Tools and Manufacture，2013，72：37-49.
[62] JAIN V K，ADSUL S G. Experimental investigations into abrasive flow machining (AFM)[J]. International Journal of Machine Tools and Manufacture，2000，40(7)：1003-1021.
[63] SANKAR M R，JAIN V K，RAMKUMAR J. Experimental investigations into rotating workpiece abrasive flow finishing[J]. Wear，2009，267(1-4)：43-51.
[64] SANKAR M R，JAIN V K，RAMKUMAR J. Nano-finishing of cylindrical hard steel tubes using rotational abrasive flow finishing (R-AFF) process[J]. The International Journal of Advanced Manufacturing Technology，2016，85(9-12)：2179-2187.
[65] KAR K K，RAVIKUMAR N L，TAILOR P B，et al. Preferential media for abrasive flow machining[J]. Journal of Manufacturing Science and Engineering-Transactions of the ASME，2009，131(1)：011009.
[66] KWON B C，KIM K H，KIM K H，et al. New abrasive deburring method using suction for micro burrs at intersecting holes[J]. CIRP Annals，2016，65(1)：145-148.
[67] UHLMANN E，MIHOTOVIC V，SZULCZYNSKI H，et al. Developing a process model for abrasive flow machining[M]. Berlin，Heidelberg：Springer Berlin Heidelberg，2009，73-78.
[68] 苏睿. 水喷射加工及其在去毛刺中的应用[J]. 科技经济导刊， 2018，26(22)：26-27. SU Rui. Water jet processing and its application in deburring [J]. Technology and Economic Guide，2018，26(22)：26-27.
[69] 张汉辰，陈红玲，杨胜强，等. 超声空化去毛刺的理论分析及数值仿真[J]. 应用声学，2015，34(2)：119-124. ZHANG Hanchen，CHEN Hongling，YANG Shengqiang，et al. Theoretical analysis and numerical simulation of ultrasonic cavitation deburring [J]. Journal of Applied Acoustics，2015，34(2)：119-124.
[70] WU C Q，NAKAGAWA N，ZHOU S F. Development of a non-contact micro-deburring method using ultrasonic cavitation bubbles[J]. Advanced Materials Research，2012，512-515：1877-1881.
[71] 许志龙. 光面晶体硅—陷光膜复合吸光结构的设计制造及性能研究[D]. 厦门：华侨大学，2020. XU Zhilong. Design，fabrivation and performance research of light absorption structure recombined with smooth crystal silicon and light trapping film. [D]. Xiamen：Huaqiao University，2020.
[72] KHMELEV V. N，TSYGANOK S. N，KUZOVNIKOV Y M，et al. Study of ultrasonic cavitation action on the process of part cleaning from burrs[C]// 201617th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM). IEEE，2016：275-279.
[73] 帅和平. 新型铜合金化学去毛刺剂的研制[J]. 电镀与环保， 2017，37(2)：50-52. SHUAI Heping. Development of new chemical deburring agent for copper alloy [J]. Electroplating and Pollution Control，2017，37(2)：50-52.
[74] WEI Z F，ZHENG X H，YU Z Y. Mathematical modeling and experimental study on electrochemical deburring of miniature Holes[J]. Advanced Materials Research，2013，721：382-386.
[75] LEE E，WON J，SHIN T，et al. Investigation of machining characteristics for electrochemical micro-deburring of the AZ31 lightweight magnesium alloy[J]. International Journal of Precision Engineering and Manufacturing，2012，13(3)：339-345.
[76] SARKAR S. Mathematical modeling for controlled electrochemical deburring (ECD)[J]. Journal of Materials Processing Technology，2004，147：241-246.
[77] LEE S，LIU C P，FAN T J，et al. Deburring miniature components by electrochemical method[J]. International Journal of Electrochemical Science，2013，8(2)：1713-1721.
[78] DEB D，BALAS V E，DEY R. Electrochemical deburring of Al6082 using NaCl electrolyte：An exploratory study[M]. Singapore：Springer Singapore Pte. Limited，2019：757，445-457.
[79] BHATTACHARYYA B，MUNDA J. Experimental investigation into electrochemical micromachining (EMM) process[J]. Journal of Materials Processing Technology，2003，140(1)：287-291.
[80] KADAM S P，MITRA S. Electrochemical deburring - A comprehensive review[J]. Materials Today：Proceedings，2021，46：141-148.
[81] LEE S H，DORNFELD D A. Precision laser deburring[J]. Journal of Manufacturing Science and Engineering，2001，123(4)：601-608.
[82] JEONG Y H，HANYOO B，LEE H U，et al. Deburring microfeatures using micro-EDM[J]. Journal of Materials Processing Technology，2009，209(14)：5399-5406.
[83] ISLAM M M，LI C P，WON S J，et al. A deburring strategy in drilled hole of CFRP composites using EDM process[J]. Journal of Alloys and Compounds，2017，703：477-485.
[84] KIM J，KIM Y，SEO J W，et al. Deburring drilled holes in CFRP composites with large pulsed electron beam (LPEB) irradiation[J]. Journal of Manufacturing Processes，2019，40：68-75.
[85] KIM J，PARK H W. Hybrid deburring process assisted by a large pulsed electron beam (LPEB) for laser-fabricated patterned metal masks[J]. Applied Surface Science，2015，357：1676-1683.
[86] KURNIAWAN R，THIRUMALAI K S，ARUMUGA P V，et al. Measurement of burr removal rate and analysis of machining parameters in ultrasonic assisted dry EDM (US-EDM) for deburring drilled holes in CFRP composite[J]. Measurement：Journal of the International Measurement Confederation，2017，110：98-115.
[87] TAN K L，YEO S H. Surface finishing on IN625 additively manufactured surfaces by combined ultrasonic cavitation and abrasion[J]. Additive Manufacturing，2020，31：100938.
[88] TAN K L，YEO S H. Surface modification of additive manufactured components by ultrasonic cavitation abrasive finishing[J]. Wear，2017，378-379：90-95.
[89] KUMAR A S，DEB S，PAUL S. Ultrasonic-assisted abrasive micro-deburring of micromachined metallic alloys[J]. Journal of Manufacturing Processes，2021，66：595-607.
[90] KUMAR A S，DEB S，PAUL S. Burr removal from high-aspect-ratio micro-pillars using ultrasonic-assisted abrasive micro-deburring[J]. Journal of Micromechanics and Microengineering，2022，32(5)：55010.
[91] MISRA A，PANDEY P M，DIXIT U S. Modeling and simulation of surface roughness in ultrasonic assisted magnetic abrasive finishing process[J]. International Journal of Mechanical Sciences，2017，133：344-356.
[92] MISRA A，M. PANDEY P，DIXIT U S. Modeling of material removal in ultrasonic assisted magnetic abrasive finishing process[J]. International Journal of Mechanical Sciences，2017，131-132：853-867.
[93] ZHOU Y，GAO Y，WU B，et al. Deburring effect of plasma produced by nanosecond laser ablation[J]. Journal of Manufacturing Science and Engineering，2014，136(2)：024501.
[94] WANG K，SHEN Q，HE B. Localized electrochemical deburring of cross hole using gelatinous electrolyte[J]. Materials and Manufacturing Processes，2016，31(13)：1749-1754.
[95] LEE J W，HA S J，HONG K P，et al. A study on the analysis method of shape quality and the micro burr removal on a micro pyramid pattern using the micro MR fluid jet polishing system[J]. Smart Materials and Structures，2016，25(4)：45001.