Online Compensation Method of Thermal Error in Atmospheric-pressure Plasma Jet Machining

doi:10.3901/JME.2023.21.075

Abstract

Abstract: Due to the chemical etching principle of atmospheric-pressure plasma jet (APPJ) machining, the material removal rate is highly susceptible to temperature fluctuations. However, the surface residual errors caused by temperature fluctuations during the machining process are still difficult to predict and suppress. To compensate the nonlinear errors caused by thermal effects, an APPJ machining system capable of online measuring the temperature in the processing area is established. The influence of global and local thermal effects on the material removal rate during the processing is analyzed, and a time-varying nonlinear removal function model and calibration method considering thermal effects are established. Based on real-time measurement data of temperature in the processing area, an online compensation method for thermal errors in the APPJ machining based on dwell time adjustment is proposed. The experimental results of figuring fused quartz optical elements show that the proposed method effectively compensates for the surface residual errors caused by temperature fluctuations during processing. The PV of residual errors is reduced from 362.71 nm to 132.25 nm with an improvement of 63.54%, the RMS is reduced from 90.02 nm to 33.45 nm with an improvement of 62.84%. The results provide new ideas and references for improving the figuring accuracy of APPJ machining.

Key words: atmospheric pressure plasma, thermal effect, removal function, dwell time, online error compensation

CLC Number:

V261

LI Zhoulong, WANG Rui, FAN Zhe, ZHU Limin. Online Compensation Method of Thermal Error in Atmospheric-pressure Plasma Jet Machining[J]. Journal of Mechanical Engineering, 2023, 59(21): 75-84.

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