Capillary Force Based Micromanipulation of Chips

doi:10.3901/JME.2023.06.285

Abstract

Abstract: A capillary force based micromanipulation method was proposed for pick-up, releasing and self-alignment of microchips with the shape matching receptor sites. A double iteration algorithm was developed to simulate the shape of the liquid meniscus, and the pick-up and the releasing forces were analyzed. The mechanism and critical conditions of pick-up and releasing of microchips were further studied. The influence of the volume of the droplet and water contact angle of the receptor sites on the pick-up and releasing force were studied. The results show that the pick-up force and releasing force increase with the increase of the volume of the droplet. The releasing force increases with the decrease of the contact angle on the receptor site. Furthermore, the proposed capillary force based micromanipulation method was demonstrated through experiments and the influence of droplet volume on the assembly of microchips was studied. Finally, the success rate of pick-up and releasing was analyzed statistically. The proposed capillary force based micromanipulation method has great potential in integration of soft robots, micro-electromechanical systems, and wearable devices.

Key words: micromanipulation, capillary force, microasssembly, self-alignment, microchips, surface tension

CLC Number:

TP121

WANG Binkai, CHANG Bo, ZHANG Heng. Capillary Force Based Micromanipulation of Chips[J]. Journal of Mechanical Engineering, 2023, 59(6): 285-294,308.

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