Research Progress on Contamination Damage and Cleaning Technology of Large-aperture Diffraction Grating

doi:10.3901/JME.2022.09.270

Abstract

Abstract: The contamination damage of large-aperture diffraction grating is the bottleneck limiting the output energy improvement of ultra-short and ultra-strong pulse laser system at present. Focusing on the damage and cleaning of grating, this study analyzes the working principle and structural characteristics of diffraction grating, explores the improvement measures of grating performance, and concludes that contamination is one of the important causes of grating damage. In the process of grating contamination damage, the pulse length and the type of contaminants have important effects on the grating damage characteristics. The source and composition of the contaminants on the grating surface are analyzed. It is concluded that the contamination on the grating surface can be divided into two categories: manufacturing and transportation contamination, operation environment contamination. The combination of multiple cleaning technologies is an important trend of future development. The characteristics of cleaning technology with large-aperture diffraction grating are analyzed and compared. It is considered that the plasma in-situ cleaning method can effectively remove the organic contaminants produced during the operation of the facility, and it is the preferred in-situ cleaning technology for the future laser system. Based on the comparison of the characterization methods of the surface contaminants of the grating, the contamination state and cleaning effect of the grating were evaluated by combining the parameters of the grating laser-induced damage threshold (LIDT), diffraction efficiency (DE)and prism mechanical properties. The purpose of this study is to break the technical bottleneck of laser system energy output through the analysis and research of contamination damage characteristics of large-aperture diffraction grating, expand the idea of in-situ contaminant removal of large-aperture optical components, and lay a foundation for the performance improvement of ultra-short and ultra-strong pulsed laser system.

Key words: large-aperture diffraction grating, contamination damage, LIDT, diffraction efficiency, plasma cleaning

CLC Number:

TQ413
TJ9

LI Yuhai, BAI Qingshun, SUN Hao, ZHANG Peng, LU Lihua, DU Yunlong, MIAO Xinxiang, YUAN Xiaodong, LIU Hao, HAN Wei. Research Progress on Contamination Damage and Cleaning Technology of Large-aperture Diffraction Grating[J]. Journal of Mechanical Engineering, 2022, 58(9): 270-282.

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