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CN: 11-2187/TH
ISSN: 0577-6686
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中文
Research Progress on Contamination Damage and Cleaning Technology of Large-aperture Diffraction Grating
LI Yuhai, BAI Qingshun, SUN Hao, ZHANG Peng, LU Lihua, DU Yunlong, MIAO Xinxiang, YUAN Xiaodong, LIU Hao, HAN Wei
Journal of Mechanical Engineering . 2022, (
9
): 270 -282 . DOI: 10.3901/JME.2022.09.270
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