Abstract: A high-resolution stereolithography system to build small objects with intricate structure is developed. With this system, it is possible to build component with the dimensions of 65 mm×65 mm×150 mm in resolution of 0.02 mm. This newly developed apparatus consists of a He-Cd laser with TEM00 beam quality, an improved optical scanning system, a novel recoating system and a comprehensive control system. The improved optical scanning system consisting of a beam expander, a galvanometric scanner with automatic self-calibra- tion and an f-theta lens can get a laser light spot with the diameter of 0.012 mm on the focal plane. The novel recoating system consisting a roller pump for accurately supplying resin, a resin vat with an integrated high-resolution translation stage and component building platform, and a scraper can obtain resin layers with the thickness of 0.02 mm. The high-resolution SL system set-up is described in detail. Examples of drip irritation emitters and other small size parts fabricated by the system are shown.

Key words: High-resolution, Rapid prototyping, Recoating, Stereolithography