Abstract: A mathematical model is built up for the substrate temperature of the large-aera hot filament chemical vapor deposition system. A recurrent fuzzy-neural network strategy for the substrate temperature control system is presented. Then computer simulation and test study on the system are performed. The results show that the controller has strong abilities of self-adapting and self-study, can successfully track the set curve of the substrate temperature and meet well the need of the temperature control during depositing diamond films.

Key words: Automatic control, Fuzzy-neural network, Hot filament chemical vapor deposition, Substrate temperature, automotive interior design, design the material test device, fuzzy comprehensive evaluation, industrial design the material evaluation, user tactile experience