Abstract: The frequency characteristics of a two-degrees laterally vibrating MEMS filter are analyzed. With the fabrication error on the sidewall of fold beam being considered, the first sensitivity functions of two natural frequency to the fabrication error are derived. A simple relationship between the proof mass and perimeter, and the beam width is developed. Some important conclusions between the width of fold beam, the width of compensatory-hole wall and the number of compensatory-hole are presented for the filter design, and a robust design scheme is developed. Design examples are given finally. The results and principles presented can be used to design and analyze other multiple degrees of freedom MEMS devices.

Key words: Filters, MEMS, Microelectromechanical, Robust resign