Research on Precision Self-sensing Method for Displacement and Force of Piezoelectric Actuator

doi:10.3901/JME.260107

Abstract

Abstract: In order to reduce the cost and design difficulty of the micro-nano positioning system, a self-sensing method is used to obtain the output displacement and force of the piezoelectric actuator. First, based on the fact that the piezoelectric actuator deforms under external forces and voltages, while the piezoelectric wafer forms a charge on its surface by generating electrodes, and then based on the first type of piezoelectric fundamental equations and considering the effects of the piezoelectric actuator’s leakage resistance and the operational amplifier’s bias current, the current-integration method is proposed to be able to precisely and conveniently self-perceive the piezoelectric actuator’s output displacements and forces. Secondly, the precise identification methods of op-amp bias current, piezoelectric actuator leakage resistance, charge-displacement coefficient, and charge-force coefficient, which affect the accuracy of self-awareness, are given, and the corresponding identification is carried out through experiments. Finally, the effectiveness of the proposed precise and simple self-perception method is experimentally verified, and the results show that the proposed self-aware method not only has high accuracy, resolution, and stability but also can better reflect the creep and hysteresis characteristics of the output displacement and force of piezoelectric actuators.

Key words: piezoelectric actuators, displacement self-sensing, force self-sensing, current integration, parameter identification

CLC Number:

TH703

WANG Yu, CUI Yuguo, YANG Yiling, CUI Zhiying, MAO Haoyang, LOU Junqiang. Research on Precision Self-sensing Method for Displacement and Force of Piezoelectric Actuator[J]. Journal of Mechanical Engineering, 2026, 62(4): 75-85.

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