Mechanism-driven Motion Error Modeling for Closed Hydrostatic Guideways

doi:10.3901/JME.2025.11.301

Abstract

Abstract: The closed hydrostatic guideway has been widely used in ultra-precision CNC machine tools due to its advantages of high motion precision and large support rigidity. The motion error is one of the key indicators for its performance evaluation. Aiming at the quantitative analysis of motion error and deviation of accuracy design results caused by the difficulties of accurate measurement of the guide rail surface geometric error of the assembly, a mechanism-driven proposal is proposed. The vertical motion error analysis model is established by the error averaging effect, and the model is verified by the high-precision measurement and fitting data of the guide rail surface. Firstly, a calculation method of oil film thickness of a single oil pad considering the contour error of the guide rail surface is proposed, which realizes the solution of the actual oil film bearing capacity of the oil pad, establishes the balance equation and quantitatively analyzes the linear error of the moving slider. The geometric error data of the guide rail surface of the closed hydrostatic guideway assembly are collected, and the Fourier series is used to fit the contour error of the guide rail surface, and the straightness error parameters of the guide rail surface are identified based on the least squares method. Based on the geometric error data of the guide rail surface obtained by fitting, the motion error modeling method is optimized and verified. Experiments show that the proposed motion error quantification method has good accuracy. There is a high degree of consistency between the prediction accuracy and the actual measured value of the vertical motion error in the stroke from 0 to 220 mm. The screw at the end position of the keeper rail is preloaded non-uniformly, which can effectively improve the vertical linear deviation of the slider. The model can predict the vertical motion error of the closed hydrostatic guideway under different physical parameters. The research results provide a reference for further quantitative analysis of the closed hydrostatic guideway motion error and its accuracy design.

Key words: mechanism drive model, closed hydrostatic guideway, motion error, geometric error measurement

CLC Number:

TH133

ZHA Jun, CHEN Bohao. Mechanism-driven Motion Error Modeling for Closed Hydrostatic Guideways[J]. Journal of Mechanical Engineering, 2025, 61(11): 301-310.

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