Research Progress on Composite Protection of Advanced Equipment Surfaces Using Magnetron Sputtering Technology

doi:10.3901/JME.2025.10.036

Abstract

Abstract: With the development of science and technology, the issue of surface protection for advanced equipment has become increasingly prominent, especially the research on surface protection technology for high-precision and high-performance components, which is one of the key scientific problems that has long troubled many researchers. Nowadays, many technological advancements rely on creating new composite materials with enhanced performance. Among them, magnetron sputtering technology, due to its strong adaptability to material surfaces and diverse element selection, provides a new control dimension for the preparation of surface protection films for various advanced equipment. Therefore, to further summarize the protection requirements of high-precision and advanced components inside advanced equipment and to address the challenges of surface protection of equipment, this study reviews the latest progress in magnetron sputtering thin film deposition technology. On the one hand, it reviews the variation mechanism and formation mechanism of the magnetron sputtering thin film deposition process, clarifies the influence of target sputtering on the performance of substrate materials, and further analyzes the reliability of thin film deposition in the time and space dimensions. On the other hand, it elaborates on the application characteristics and formation behavior of various surface protection films for equipment. Finally, in light of the technological attributes of magnetron sputtering coating, a thorough analysis of the flux features during the magnetron sputtering film deposition process is conducted, and the factors influencing the film deposition state, such as microstructure and surface properties, are explored. This paper summarizes the application mechanism of advanced equipment surface magnetron sputtering coating technology. Starting from the perspectives of the microstructure, mechanical properties, and service performance of magnetron sputtering coatings, and in combination with typical applications of magnetron sputtering coating technology, the development trends of magnetron sputtering coating technology are reviewed. The advantages and existing problems of its application prospects are summarized, and an assessment and outlook on the future advanced film systems of magnetron sputtering coating technology are provided.

Key words: advanced equipment, magnetron sputtering, film protection

CLC Number:

TB302

ZHAO Licun, WANG Zhiyuan, LIU Yang, JIANG Wei, LIU Jinna. Research Progress on Composite Protection of Advanced Equipment Surfaces Using Magnetron Sputtering Technology[J]. Journal of Mechanical Engineering, 2025, 61(10): 36-65.

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