Micro-displacement Precision Measurement of 6-DOF Based on Rectangular Permanent Magnet Magnetic Field Information

doi:10.3901/JME.2018.12.141

Abstract

Abstract: Utilizing the inherent magnetic field information with regular distribution of rectangular permanent magnet, a new measuring method is proposed, nonlinear computational measurement scheme, which uses hall sensors array as sensor detection module, for achieving 6-DOF micro-displacement measurement with strict mathematical orthogonal properties. Magnetic induction model B(X) is built, using the correspondence relationship between distributed magnetic field and space position, as measurement model. A uniformly arranged hall sensors array is designed for detecting magnetic induction B. Based on the continuity principle of motion, nonlinear measurement model is resolved by successive solving algorithm. With additive white Gaussian noise, Monte Calro simulation result verifies its feasibility. The testing result shows that XY translation measurement error standard deviation is less than 80 μm in the micro-displacement measurement range of 10 mm, the measurement error standard deviation of Z direction is less than 10 μm in measurement range of 2 mm, and rotation measurement error standard deviation is less than 5 mrad in the range of π/6.

Key words: magnetic information, nonlinear computational measurement, precision measurement, successive solving algorithm

CLC Number:

TH71

CHENG Rong, HU Jinchun, DU Shengwu, ZHU Yu, GAO Zhenyu. Micro-displacement Precision Measurement of 6-DOF Based on Rectangular Permanent Magnet Magnetic Field Information[J]. Journal of Mechanical Engineering, 2018, 54(12): 141-147.

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