Abstract: Quartz tuning fork is a time base device with stable harmonic resonance frequency and high Q-factor. The resonant parameters of tuning fork arm(resonance amplitude and resonance frequency) are sensitive to the micro force. Based on the sensitivity of the micro-fork to external force and combining with a tungsten tip, a new scanning probe for surface micro-topography measurement is fabricated. Co-operating with xyz piezo-electrical scanner and using the sensitivity of resonant probe to the scanning micro force, a scanning probe microscopy based on phase feedback control is developed. The structure, operating mechanism and performance test of the probe are given, and then the structure, test and analysis of the scanning probe microscope are described. Through the analysis of the test results of the probe and system, the system has a vertical resolution of 1.2 nm. Besides, an one-dimensional measurement optical grating is measured by the scanning probe microscope, and the surface topography and its phase map of the sample are obtained. The results show that the new scanning probe microscope operates effectively. In addition, because of using large aspect ratio of the tungsten tip, the system has the capacity of measuring micro structure with large aspect ratio.

Key words: Phase feedback, Quartz tuning fork, Scanning probe microscope, Tungsten tip