Abstract: In biomedical areas, thousands of reagents with different viscosities and various desired volume need to be dispensed in submicroliter range simultaneously. Therefore, most of the commercial automated liquid dispensing systems need to be calibrated through experiment to accurately dispense liquids when the reagents viscosities change, which is time consuming and not accurate enough. A high-throughput self-adjusted precise liquid handling system is developed, in which a MEMS flow sensor is used. The system construction is introduced in detail. A novel closed-loop control strategy based on compound intelligent fuzzy control method is proposed to calculate the valve open time in each dispensing cycle, which makes the system immune to liquid viscosity, pressure fluctuation, and other sources of error. Dispensing results show that the system can achieve better dispensing performance, and the coefficient of variance (CV) for liquid dispensing is below 3% at 1 μL and below 4% at 100 nL.

Key words: Intelligent fuzzy control, Liquid dispensing, MEMS flow sensor