Abstract: The current status of micro-nano manufacture technology in China is outlined firstly. The new research developments on micro mechanical properties, micro friction wear and sticking, micro fluidics in typical micro flow device, topological optimum application in micro-nano structural design, micro thermal transforming behavior in micro electro mechanical system (MEMS) are emphasized. The new achievements on design methodology of MEMS, the manufacture techniques including silicon base and no silicon base are introduced, the new developments on such as micro sensors, micro actuators, micro system as well as lab-on-chip device and micro power system are also listed. Finally, some conclusions are given out.

Key words: Micro actuator, Micro electro mechanical system(MEMS), Micro sensor, Micro-nano manufacture technology