Abstract: A tuning fork vibratory micromachined gyroscope fabricated by the bulk silicon micromachining technology is studied. The self-organizing method of shape optimization is presented based on cellular automata (CA). The local rule and performance evaluation function are derived for the self-organ- izing shape optimization. The shape of the micromachined gyroscope is optimized. The substructuring model of the micromachined gyroscope is established to conduct analysis with a reasonable accuracy and a reduced computational cost. The validity of the method is tested by a numerical example. The optimization result shows that the performance of micromachined gyroscope is promoted greatly without change in the high Q-qualify factors. Based on promotion of analysis accuracy and efficiency, the method and results of self-organizing shape optimization for micromachined gyroscope have important reference value to the analysis, design and evaluation of performance of the tuning fork vibratory micromachined gyroscope in coupled multiphysics fields environment.

Key words: Cellular automata, Micromachined gyroscope, Self-organizing, Shape optimization, Substructuring