Abstract: Based on a high resolving capability scanning tunneling microscope and development on hardware and software design, a new-style higher resolving capability and more useful AFM is developed. The principles of operation, components and some applications of the AFM system is resported. And the special design of the lens body and control process and the manufacture and work process of cantilever are introduced in detail. The AFM adopted a new simple and useful cantilever. This model uses an STM to detect the shift of the cantilever and uses four motors and two PZT tubes to enlarge the scanning rage and to enhance the resolution effectively. The AFM’s resolving capability is as follows: transverse: 0.1 nm, vertical: 0.01 nm. Several images given as samples are obtained with the model.

Key words: Atomic force microscope(AFM), Cantilever, Hardware design, Lens body