Abstract: A new precision rotary piezoelectric PZT actuator is proposed to improve its drive capabilities. The actuator is based on the PZT technology. The actuator adopts the principle of bionics and works with a new method of stator inner anchor/loosen and a distortion structure of thin shelf flexible hinge. This structure improves the stability in the process of its anchor/loosen and step rotary. Its characteristic is analyzed from the finite element analyses. From the experiment, the resolution, rotary speed, rotary torque, etc. is measured. It shows that the new rotary PZT actuator can works with high frequency (40 Hz), high speed (325 μrad/s), large travel (360°), high resolution (1 μrad) and high torque (30 N·cm). The actuator will be applied for large travel and high resolution driving device, optics engineering, precision positioning and some mi-cro-manipulation field.

Key words: Finite element analyses, Piezoelectric element, Resolution, Stator inner anchoring/loosen, Thin shelf flexible hinge