Abstract: Approach of global microvision-based visual servoing for micropositioning is analyzed. Imaging model of G-stereoscopic microscope is derived. According to techniques of image-based visual servoing and stereovision, 3D visual servoing model for micropositioning is built up. The experiments to verify its precision and feasibility are conducted with in-house micromanipulation system and the error factors to affect the precision of micropositioning are analyzed too. The pivotal parameters are acquired through calibration. From the experiment results,the positioning error is about ±(3～4) μm with this visual servoing model for micropositioning. Its precision and stability can be satisfied for micropositioning.

Key words: Stereo vision, Visual servoing, Micromanipulation, Micropositioning