Abstract: Manufacturing part at micron or nanometer scale is key technology for developing MEMS. Firstly designing a diamond tool by experiments, it’s main parameters as follow: K r =93°, K 'r =30°, g0 =0°, a0 =5°. Furthermore using this tool turning as small as f7 mm micro-shaft. Then researching the relationship between micro-shaft’s surface quality and the main turning technical parameters such as feed, spindle speeds and the amount of back infeed. The results indicate that the feed not noly effect the surface quality of shaft, but also effect the shaft taking shape whether or not. In the range of shaped, the feed has marked influence, it direct ratio to roughness; the back infeed and spindle speed have little influence. As an example, presenting some samples based on different machining parameters.

Key words: Micron-nanometer part, Precision cutting, MEMS, Micro-shaft machining, compliant mechanism, multi-objective optimization, multiple materials, topology optimization