Abstract: The nonlinearity of moment-angle relationship of the beams in a kind of micromachine vibratory angular rate sensor is derived by using energy method. Under the considering of this nonlinearity, the frequency characteristie of the sensor is analyzed. Test results show that nonlinear vibration phenomenon does exist in micromachine vibration beams, and the calculated curves of the formulas derived accords with the measured data. Finally, the ways to reduce the nonlincarity are introduced.

Key words: Micromachine, Microsensor, Nonlinear vibration, Traction motor Elevator Accumulator Energy saving Hybrid drive