Abstract: A general method is proposed for accuracy analysis of parallel micro robot. The method represents the effects of all possible error sources on robotic mechanisms as generalized geometric errors in a unified manner. Based on the back differential relationship between any two coordinate frames, the generalized geometric error model is established from the kinematics equations and the loop property of parallel structure. The model can be used to evaluate the accuracy and error correction. A simulation of the accuracy analysis of parallel micro robots demonstrates the effectiveness of the model. Although the method is used for the analysis of micro motion robots, it can also be employed to handle error modeling and analysis of any general parallel robot.

Key words: Accuracy analysis, Generalized geometric error model, Micro motion robot