PRINCIPLE OF SELF-CALIBRATION METHOD AND CALIBRATION OF 2-D DISPLACEMENT SENSOR

Abstract

Abstract: A novel principle of self-calibration method is presented, which can be used in the calibration of two -dimentional PSD (Position sensing detector). Adopting this method without any special standard, the linearity errors of a pair of 2-D sensors can be calibrated themselves within their performance limitations. The experimental devices and the results of self-calibration of 2-D PSD are also introduced.

Key words: 2-D Sensor, Criterion, PSD (Position Sensing Detector), Self-calibration method

CLC Number:

TH822

Lin Yuchi;Liu Zhijun. PRINCIPLE OF SELF-CALIBRATION METHOD AND CALIBRATION OF 2-D DISPLACEMENT SENSOR[J]. , 1999, 35(3): 94-97.

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PRINCIPLE OF SELF-CALIBRATION METHOD AND CALIBRATION OF 2-D DISPLACEMENT SENSOR

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