Analysis and Experiment of Gripping Force Sensing of Piezoelectrically Driven Compliant Gripper

doi:10.3901/JME.260172

Abstract

Abstract: With the increasing application of micromanipulation technology in high-precision applications, achieving real-time sensing of the gripping force is crucial for improving the performance of compliant grippers. This study modeled, analyzed, and experimentally investigated the integrated force sensing function of a piezoelectrically driven compliant gripper based on strain gauges. By attaching strain gauges to the flexure hinge to construct a force sensing unit, a theoretical model of the relationship between gripping force and strain was established, and the influence of the flexible beam’s structural parameters on the strain response is analyzed. The results showed that reducing the width and thickness of the flexible beam and increasing its length significantly increased the maximum surface strain. Finite element simulations validated the accuracy of the theoretical model, with a relative error of only 4.22%. Experimental calibration established a linear relationship between gripping force and strain. The input voltage, input displacement, and strain relationships of the piezoelectric actuator were further calibrated for gripping copper wires with diameters of 800 μm and 400 μm, respectively. A third-order polynomial fit was performed on the average values of the experimental data using the least squares method to obtain a functional relationship between the input voltage/displacement and gripping force, providing an effective method for accurate prediction and dynamic control of gripping force.

Key words: compliant gripper, force sensing, strain gauge, piezoelectric drive, polynomial fitting

CLC Number:

TH823

LIU Min, ZHANG Jia, ZHAN Jinqing, ZHU Benliang, WANG Hua, ZHANG Xianmin. Analysis and Experiment of Gripping Force Sensing of Piezoelectrically Driven Compliant Gripper[J]. Journal of Mechanical Engineering, 2026, 62(9): 52-61.

Add to citation manager EndNote|Reference Manager|ProCite|BibTeX|RefWorks

URL: http://www.cjmenet.com.cn/EN/10.3901/JME.260172

http://www.cjmenet.com.cn/EN/Y2026/V62/I9/52

References

[1] LIU M，ZHAN J，ZHU B，et al. Topology optimization of compliant mechanism considering actual output displacement using adaptive output spring stiffness[J]. Mechanism and Machine Theory，2020，146：103728.
[2] LING M，YUAN L，ZHANG X. Geometrically nonlinear analysis of compliant mechanisms using a dynamic beam constraint model (DBCM)[J]. Mechanism and Machine Theory，2024，191：105489.
[3] 张赫，李海铭，张佳闪，等. 面向腔镜微创手术的连续体机械手关键技术与研究进展[J]. 机械工程学报，2023，59(19)：44-64. ZHANG He，LI Haiming，ZHANG Jiashan，et al. Key technologies and research progress of continuum manipulators for minimally invasive laparoscopic surgery[J]. Journal of Mechanical Engineering，2023，59(19)：44-64.
[4] LIU M，LU L，ZHAN J，et al. Layout optimization of compliant mechanism with embedded components using moving morphable component (MMC) method[J]. Mechanism and Machine Theory，2026，219：106301.
[5] 张宪民，朱本亮，李海，等. 柔顺精密定位与操作机构研究进展[J]. 机械工程学报，2023，59(19)：24-43. ZHANG Xianmin，ZHU Benliang，LI Hai，et al. Recent advances in compliant precision positioning and manipulating mechanisms[J]. Journal of Mechanical Engineering，2023，59(19)：24-43.
[6] GAN J，XU H，ZHANG X，et al. Design of a compliant adjustable constant-force gripper based on circular beams[J]. Mechanism and Machine Theory，2022，173：104843.
[7] XU H，ZHANG X，ZANG H，et al. An SMA-based compliant adjustable constant force gripper for micro-assembly[J]. International Journal of Mechanical Sciences，2024：109430.
[8] BARATI H，BARAZANDEH F，JABARI A，et al. Design and fabrication of a multi-purpose four arm electrothermal microgripper：A novel approach to control maximum gripping force limit[J]. Physica Scripta，2024，99(8)：085905.
[9] DAI J，FENG C，XIE J，et al. Design and control of an analog optical switch based on the coupling of an electrothermal actuator and a mass–spring system[J]. IEEE/ASME Transactions on Mechatronics，2023，28(5)：2517-2528.
[10] LV Z，LIU Z，TANG Y，et al. Photo-induced electrostatic actuators towards micro gap regulator and micro gripper based on lead lanthanum zirconate titanate ceramics[J]. Materials & Design，2023，232：112078.
[11] CHOI M Y，KIM K，KIM K，et al. Rapid and spatially programmed electrostatic actuation of anisotropic polymers[J]. Chemical Engineering Journal，2023，475：146237.
[12] WANG C，WANG Y，FANG W，et al. Design of a large-range rotary microgripper with freeform geometries using a genetic algorithm[J]. Microsystems & Nanoengineering，2022，8(1)：3.
[13] LI Z，CHEN L，MA Y，et al. Multi-physics coupling simulation and design of magnetic field-driven soft microrobots in liquid environments[J]. International Journal of Mechanical Sciences，2024，272：109136.
[14] KAN Q，SHI W，SONG D，et al. A micromechanical constitutive model of high-temperature shape memory alloys[J]. International Journal of Mechanical Sciences，2023，251：108328.
[15] KIM M S，HEO J K，RODRIGUE H，et al. Shape memory alloy (SMA) actuators：The role of material，form，and scaling effects[J]. Advanced Materials，2023，35(33)：2208517.
[16] 刘英想，邓杰，常庆兵，等. 压电驱动技术研究进展与展望[J]. 振动、测试与诊断，2022，42(6)：1045-1061. LIU Yingxiang，DENG Jie，CHANG Qingbing，et al. Progress and prospects in piezoelectric actuation technologies[J]. Journal of Vibration，Measurement & Diagnosis，2022，42(6)：1045-1061.
[17] 李冲，童玉健，梁康，等. 压电驱动微型精密夹持机构设计与实验研究[J]. 中国机械工程，2022，33(11)：1302-1308. LI Chong，TONG Yujian，LIANG Kang，et al. Design and experimental study of piezoelectric actuated micro precision clamping mechanisms[J]. China Mechanical Engineering，2022，33(11)：1302-1308.
[18] WANG R，YANG L，LI Z，et al. Design and control of a piezoelectric-actuated kangaroo-inspired bionic compliant mechanism for LDI machines[J]. Chinese Journal of Mechanical Engineering，2025，38(1)：116.
[19] ZHANG S，LIU J，DING H，et al. Dynamic modeling and experimental verification of an RPR type compliant parallel mechanism with low orders[J]. Chinese Journal of Mechanical Engineering，2024，37(1)：78.
[20] 许锰，杨依领，吴高华，等. 二自由度并联压电粘滑定位平台[J]. 机械工程学报，2024，60(11)：250-258. XU Meng，YANG Yiling，WU Gaohua，et al. Two-degree-of-freedom parallel piezoelectric stick-slip positioning platform[J]. Journal of Mechanical Engineering，2024，60(11)：250-258.
[21] DAS T K，SHIRINZADEH B，AL-JODAH A，et al. A novel compliant piezoelectric actuated symmetric microgripper for the parasitic motion compensation[J]. Mechanism and Machine Theory，2021，155：104069.
[22] CHEN X，XIE Z，TAN H，et al. Design and mechanical modeling of high-magnification and low-parasitic displacement microgripper with three-stage displacement amplification[J]. Mechanism and Machine Theory，2023，190：105463.
[23] ZUBIR M N M，SHIRINZADEH B. Development of a high precision flexure-based microgripper[J]. Precision Engineering，2009，33(4)：362-370.
[24] 林超，李坪洋，沈忠磊，等. 压电驱动微夹持器特性分析[J]. 仪器仪表学报，2019，40(7)：224-232. LIN Chao，LI Pingyang，SHEN Zhonglei，et al. Characteristic analysis of the micro gripper driven by piezoelectric actuator[J]. Chinese Journal of Scientific Instrument，2019，40(7)：224-232.
[25] XU Q. Design，fabrication，and testing of an MEMS microgripper with dual-axis force sensor[J]. IEEE Sensors Journal，2015，15(10)：6017-6026.
[26] PAN P，QU J，ZHANG W，et al. Robotic stimulation of freely moving drosophila larvae using a 3D-printed micro force sensor[J]. IEEE Sensors Journal，2018，19(8)：3165-3173.
[27] KANE B J，CUTKOSKY M R，KOVACS G T A. A traction stress sensor array for use in high-resolution robotic tactile imaging[J]. Journal of Microelectromechanical Systems，2002，9(4)：425-434.
[28] FAUVER M E，DUNAWAY D L，LILIENFELD D H，et al. Microfabricated cantilevers for measurement of subcellular and molecular forces[J]. IEEE Transactions on Biomedical Engineering，1998，45(7)：891-898.
[29] SPINNER S，BARTHOLOMEYCZIK J，BECKER B，et al. Electromechanical reliability testing of three-axial silicon force sensors[J]. arXiv preprint arXiv：0711.3289，2007.
[30] ZHOU C，XIA M，XU Z. Design and optimization of a quadrupedal dynamic disturbance force measurement platform using strain gauges[J]. Mechanical Systems and Signal Processing，2023，188：110032.
[31] ZHANG Q，ZHANG J. Internal force monitoring and estimation of a long-span ring beam using long-gauge strain sensing[J]. Computer-Aided Civil and Infrastructure Engineering，2021，36(1)：109-122.
[32] 崔东辉，张晓丽，刘同胜. 一种高可靠性电涡流位移传感器的设计[J]. 电子测量技术，2013，36(12)：87-91. CUI Donghui，ZHANG Xiaoli，LIU Tongsheng，et al. Design of eddy current displacement sensor with high reliability[J]. Electronic Measurement Technology，2013，36(12)：87-91.
[33] LIU M，ZHANG Q，SHAO Y，et al. Research of a novel 3D printed strain gauge type force sensor[J]. Micromachines，2018，10(1)：20.
[34] LIU M，ZHANG J，ZHAN J，et al. Design and development of a 3-DOF compliant gripper with in-plane and out-of-plane motion[J]. Precision Engineering，2025，95：136-150.