脉冲激光电化学复合的定域性研究及三维微细刻蚀加工
张朝阳;秦昌亮;冯钦玉;曾永彬;蔡明霞;毛卫平
Investigation on Localisation and Three-dimensional Micro-etching Based on Pulse Laser Electrochemical Machining
ZHANG Zhaoyang;QIN Changliang; FENG Qinyu;ZENG Yongbin;CAI Mingxia;MAO Weiping;SU Chun
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2014, (23): 200
-206
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DOI: 10.3901/JME.2014.23.200