飞秒激光加工SiC的烧蚀阈值及材料去除机理

赵清亮;姜涛;董志伟;樊荣伟;于欣;罗健

Ablation Threshold and Material Removal Mechanisms of SiC Processed by Femtosecond Laser

ZHAO Qingliang;JIANG Tao;DONG Zhiwei;FAN Rongwei;YU Xin;LUO Jian

. 2010, (21): 172 -177 .