垂直于工件平面的二维超声振动辅助磨削单晶硅表面形成机制的试验研究
梁志强;王西彬;吴勇波;赵文祥;彭云峰
Mechanism of Surface Formation for Two-dimensional Ultrasonic Vibration Assisted Grinding of Monocrystal Silicon with Vertical Workpiece Vibration
LIANG Zhiqiang;WANG Xibin;WU Yongbo;ZHAO Wenxiang;PENG Yunfeng
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2010, (19): 171
-176
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