软脆功能晶体碲锌镉化学机械抛光

张振宇;郭东明;康仁科;高航;李岩

Chemical Mechanical Polishing Research of CdZnTe Functional Crystalline with Soft Brittle Nature

ZHANG Zhenyu;GUO Dongming;KANG Renke;GAO Hang;LI Yan

. 2008, (12): 215 -220 .