• CN:11-2187/TH
  • ISSN:0577-6686
压电微动工作台的位移自感知控制
崔玉国;董维杰;高长银;孙宝元
Displacement Control of Piezoceramic Micro-motion Worktable Using Self-sensing
CUI Yuguo;DONG Weijie;GAO Changyin;SUN Baoyuan
. 2008, (4): 159 -164 .