• CN:11-2187/TH
  • ISSN:0577-6686
精研磨阶段非球面面形接触式测量误差补偿技术
程灏波
TOUCH TRIGGER PROBE MEASUREMENT ACCURACY OF ASPHERICAL MIRROR DURING FINE LAPPING PROCESS
Cheng Haobo
. 2005, (8): 228 -232 .