• CN:11-2187/TH
  • ISSN:0577-6686
非晶合金薄膜铜衬底的低损伤超光滑制备
徐洪;文东辉;欧长劲
Preparation of Ultra-smooth and Free-defect Copper Substrate for Amorphous Alloy Film
XU Hong;WEN Donghui;OU Changjing
. 2014, (1): 162 -168 .