以刚度为目标的微位移放大模块闭环设计方法

宫金良;胡光学;张彦斐

Closed Loop Design Method of Micro-driving Displacement Amplifier Module Targeting for Stiffness

GONG Jinliang;HU Guangxue;ZHANG Yanfei

. 2012, (15): 58 -64 .