纳米多孔氧化硅薄膜的表征及其基于UAFM弹性性能的检测
张改梅, 王灿, 宋晓利, 何存富, 陈强
Characterization and Measurement of Elastic Modulus Based on Ultrasonic Atomic Force Microscopy for Nano-porous Silicon Oxide Film
ZHANG Gaimei, WANG Can, SONG Xiaoli, HE Cunfu, CHEN Qiang
机械工程学报
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2018, (12): 109
-114
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DOI: 10.3901/JME.2018.12.109
