多次掩模湿法腐蚀硅微加工过程的蒙特卡罗仿真

幸研;朱鹏;倪中华;汤文成

Monte Carlo Simulation of Multiple Masking Processes for Anisotropic Wet Etching

XING Yan;ZHU Peng;NI Zhonghua;TANG Wencheng

. 2009, (1): 239 -243 .