晶圆对心转台亚微米级径跳误差补偿方法

黄春霞;曹其新;付庄;冷春涛

Submicron Radial Runout Error Compensation Method for the Turntable in a Wafer Prealigner

HUANG Chunxia;CAO Qixin;FU Zhuang;LENG Chuntao

. 2008, (9): 123 -127 .